Varian

E 220

Ion Implantation Varian E 220 family

Research Quality: 30% complete

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E 220 — Inventory photo — Fig. 01E 220Inventory photo^[1]

Plate 01Merc E220 LR15
AG CarsWatch on YouTube
Plate 02Mercedes Benz E220 Avantgarde
Ollie Kierce CarsWatch on YouTube
Plate 03Varian E220 - 150mm Implant - MC3 beam
Veilingkantoor Openbare verkopenWatch on YouTube
Plate 042025 Mercedes Benz E220. #mercedes #benz #eclass
4 Cars and WatchesWatch on YouTube

Power

3 Phase^[1]

Vacuum

Turbo Ion Source pump^[1]

Optics

Fiber optic communication cards^[1]

What is it?

The Varian E 220 is an ion implanter described as a 3-phase, 5-wire, 208-volt system with E-clamp 6" capability and single-blade processing.

Why won't it start?

Documented failure modes, common issues, and field considerations.

Turbo Ion Source pump needs to be replaced
Turbo pump right side End Station needs to be replaced
Cryo pump and sub fab compressor need to be replaced
Counter balance needs repair
Fiber optic communication cards need to be replaced
Power Supply controller (P/N E15001755) needs to be replaced
DI water filters need to be replaced
Ion source cooling water quick coupling connections need to be replaced

What do the numbers mean?

Power & electrical3

Phase: 3 Phase^[1]; 208 Volts^[1]; Power Supply controller (P/N E15001755)^[1]

Vacuum & pumping3

Turbo Ion Source pump^[1]

Accurate?

Turbo pump right side End Station^[1]

Accurate?

Cryo pump and sub fab compressor^[1]

Accurate?

Optics & imaging1

Fiber optic communication cards^[1]

Accurate?

Dimensions & facilities1

Ion source cooling water quick coupling connections^[1]

Accurate?

Configuration & options8

5 Wire^[1]

Accurate?

E-clamp 6"^[1]

Accurate?

Two loading chambers^[1]

Accurate?

Single blade processing^[1]

Accurate?

Implants Ar, AsH3, BF3 and PH3^[1]

Accurate?

Need to replace:^[1]

Accurate?

Counter balance (needs repair)^[1]

Accurate?

DI water filters^[1]

Accurate?

Vintage & configurations

1995Vintage^[1]
1995 Vintage is stated in the source.

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Phase3 Phase^[1]
Configuration208 Volts^[1]
ConfigurationTurbo Ion Source pump^[1]
ConfigurationTurbo pump right side End Station^[1]
ConfigurationCryo pump and sub fab compressor^[1]
ConfigurationPower Supply controller (P/N E15001755)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the E 220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the E 220 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the E 220 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the E 220 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the E 220 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the E 220 are on record.
Answerable by: university cleanroom staff or an OEM application specialist