Varian
Viision 200
The Varian Viision 200 is a batch-process high current ion implanter for 200 mm wafers. The VIISion 200 was introduced in 1996. The system includes variants such as the VIISion 200 PLUS2 with energies up to 200 keV and the VIISion 80LE with energies down to 250 eV.[1]
Produced
1996–
Power
3 Phase[3]
What it is
General reference — not yet source-verifiedThe Varian Viision 200 is an ion implanter used in semiconductor manufacturing.
How it works
Where it fits in the process flow
General reference — not yet source-verifiedAn ion implanter sits in the front-end doping flow after pattern definition and before thermal steps that activate or drive in implanted dopants.
Applications
General reference — not yet source-verifiedIon implantation is used to form doped regions for semiconductor devices.
What do the numbers mean?
Power & electrical4
Wafer handling1
Configuration & options8
Vintage & configurations
- 1996Production start[1]
Introduction of the VIISion series
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Viision 200, 8" - Medium Current | — | — | Described as medium current. | Equipment inventory listing[2] |
| Viision 200, 8" - High Current - 3 Phase - 5 Wire - 208 Volt - 50/60 Hz 2000 Vintage | — | 2000 | Described as high current with 3 phase, 5 wire, 208 volt, 50/60 Hz, and 2000 vintage. | Equipment inventory listing[3] |
| Viision 200, 8" - High Current - 3 Phase - 5 Wire - 208 Volt - 50/60 Hz 2013 Vintage | — | 2013 | Described as high current with 3 phase, 5 wire, 208 volt, 50/60 Hz, and 2013 vintage. | Equipment inventory listing[4] |
| VIISion 80LE | — | — | Low energy variant with energy range 250 eV to 80 keV | web.archive.org[1] |
| VIISion 200 PLUS2 | — | — | High energy variant with energy up to 200 keV | web.archive.org[1] |
| Viision 200 (Medium Current) | — | — | Medium current configuration | Equipment inventory listing[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Viision 200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
The control-system platform and OS era of the Viision 200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Viision 200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Viision 200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Viision 200 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Viision 200 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]web.archive.org — vsea.com (Jun 16, 2001)web.archive.org
- [2]Inventory photo
- [3]Inventory photo
- [4]Equipment inventory listing
- [5]Equipment inventory listing
Last updated Sep 1, 2026.
