Varian

Viision 200 + High Current

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Varian Viision 200+ (also known as Viision 200 Plus) is a high current ion implanter. The Varian Viision 200+ processes 200 mm wafers. The Varian Viision 200+ uses a Bernas ion source and a two-dimensional beam profiler.^[1]

VarianViision 200 + High Current

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Power

208 V, 140 A, 50/60 Hz, 3 Phase^[2]

Vacuum

4× CTI 250F, 2× CTI 9600 compressors^[1]

How it works

The Viision 200 uses a cassette-to-cassette wafer handling system. The system includes a cleanroom monitor and a remote service monitor for operational oversight. The control system is based on a VME (Motorola) architecture and uses SCSI-based data storage for system software and recipes.^[3]^[2]

What do the numbers mean?

Power & electrical3

Power requirements: 208 V, 140 A, 50/60 Hz, 3 Phase^[2]
Computer system: 147 MHz Main & ES CPU^[1]
Frequency kit: 50 Hz^[1]

Vacuum & pumping1

Cryo pumps: 4× CTI 250F, 2× CTI 9600 compressors^[1]

Wafer handling2

Wafer size: 200 mm^[1]
Cassette to cassette: Yes^[2]

Dimensions & facilities1

Two-dimensional beam profiler: Yes^[1]

Configuration & options2

Bernas ion source: Yes^[1]
CE-marked: Yes^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power requirements208 V, 140 A, 50/60 Hz, 3 Phase^[2]
Computer system147 MHz Main & ES CPU^[1]
Cryo pumps4× CTI 250F, 2× CTI 9600 compressors^[1]
Frequency kit50 Hz^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the wafer size capacity of the Varian Viision 200?

The Varian Viision 200 is a 200 mm system.^[1]

What type of ion source does the Viision 200 use?

The Viision 200 uses a Bernas-type ion source.^[1]

Not publicly documented

The following facts about the Viision 200 + High Current are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Viision 200 + High Current are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Viision 200 + High Current are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Viision 200 + High Current are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Viision 200 + High Current are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Viision 200 + High Current is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]fabsurplus.com — fabsurplus.comfabsurplus.com
[2]surplus.infineon.com — surplus.infineon.comsurplus.infineon.com
[3]Applied Materials (AMAT) Varian VIISion 200 - Solid State Disks Ltd (SSD) — solidstatedisks.comsolidstatedisks.com
[4]Equipment inventory listing