YES

3TA

Thermal / Diffusion 4 in, 5-6 in, 8 in, 12 inIntroduced 1980Produced 1980–YES 3TA family

Research Quality: 30% complete

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YES3TA

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Plate 01Yield Engineering YES-3TA Vapor Prime Oven #58252
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Plate 02Yield Engineering YES-3TA Vapor Prime Oven #58252
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Wafer size

4 in, 5-6 in, 8 in, 12 in

Produced

1980–

Vacuum

Vacuum Bake / Vapor Prime Systems^[2]

Performance

2 full loads/hr^[1]

What is it?

The sources describe the YES-3TA as part of Yield Engineering Systems' Vacuum Bake/Vapor Prime systems. It is listed with capacities for 8 cassettes of 4-inch wafers or 1 cassette of 5-8 inch wafers, 2 full loads per hour throughput, less than 10x1-micron particles per 4-inch wafer cleanliness, HMDS usage under 4 ml per 200 wafers, and a maximum temperature of 160°C.

What can it run?

Process applications and technology nodes documented for this tool.

pre-programmed dehydration
vapor deposition of a priming agent

What do the numbers mean?

Vacuum & pumping1

Category: Vacuum Bake / Vapor Prime Systems^[2]

Wafer handling3

Capacity: 8 cassettes of 4-inch wafers, or 1 cassette of 5-8 inch wafers^[1]
Cleanliness: less than 10x1 micron particles per 4-inch wafer^[1]
HMDS usage: <4 ml/200 wafers (120 prime cycles/pint)^[1]

Performance1

Throughput: 2 full loads/hr^[1]

Configuration & options2

Model: YES-3TA^[2]
Temperature: 160°C max^[1]

Vintage & configurations

1980Production start^[1]
Vacuum Bake / Vapor Prime was the first product YES produced back in 1980.

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

CategoryVacuum Bake / Vapor Prime Systems^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 3TA are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the 3TA are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 3TA are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 3TA are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 3TA is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 3TA are on record.
Answerable by: an OEM parts catalog or a service engineer