3TA

The YES 3TA is a vacuum bake and vapor prime system. The YES 3TA belongs to the YES Vacuum Bake/Vapor Prime product line. The YES 3TA provides a one stop environment for pre programmed dehydration and vapor deposition of a priming agent.^[3][1]

The YES 3TA performs pre programmed dehydration and vapor deposition in a single environment. The YES 3TA has capacity for 8 cassettes of 4 inch wafers, or 1 cassette of 5 to 8 inch wafers. The YES 3TA has throughput of 2 full loads per hour. The YES 3TA uses less than 4 ml of HMDS per 200 wafers. The YES 3TA operates at a maximum temperature of 160 degrees C.^[1]

The YES Vacuum Bake Vapor Prime System is used for priming substrates prior to organic coating. The YES Vacuum Bake Vapor Prime System is used where demanding applications cannot tolerate undercutting and require the adhesion achieved by the batch process. A typical YES primed wafer remains fully primed and hydrophobic for weeks after deposition.^[1]

Vacuum bake and vapor prime systems are used when wafer surfaces need dehydration and adhesion promotion before organic films are applied. Vacuum bake and vapor prime systems are relevant to photolithography preparation and other coating flows that depend on stable surface chemistry.