YES

G 1000 LMC

Wet Processing / Clean YES G 1000 LMC family

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G 1000 LMC — Inventory photo — Fig. 01G 1000 LMCInventory photo^[1]

Power

0-1000 watts @ 550 VAC, selectable power^[1]

Vacuum

Edwards iXH100 Vacuum Pump^[1]

Gas delivery

3 optional, for gas mixing capability^[1]

Optics

0-1200 seconds (20 minutes)^[1]

What is it?

The Yes G 1000 LMC is a plasma cleaner with 8 standard shelves, 3 standard process gas inputs, and selectable RF plasma power up to 1000 watts.

What do the numbers mean?

Power & electrical3

RF Plasma Power: 0-1000 watts @ 550 VAC, selectable power^[1]
RF Leakage Magnetic: 0.6 mA/m, 4.15 x 10-7 A2/m2 Average^[1]
RF Leakage Electrical: 1.6 V/m, 4.2 V2/m2 Average^[1]

Vacuum & pumping1

Type of pumps: Edwards iXH100 Vacuum Pump^[1]

Gas & chemistry5

No. of Mass Flow Controllers: 3 optional, for gas mixing capability^[1]
No. of Process Gas Inputs: 3 standard^[1]
Type of Gases used: Oxygen and Nitrogen^[1]
Process Gas Flow Rate: 20-50 SCCM average^[1]
Process Gas Inputs: 3 standard, 4th optional^[1]

Optics & imaging2

Range of Exposure Time: 0-1200 seconds (20 minutes)^[1]
Resolution of Timer Setting: 1 second^[1]

Control & software2

Software^[1]
Number of Recipes: 12 with load / save / loop / link capability^[1]

Configuration & options7

No. of trays & type: 8 Standard Shelves (6 inside and 2 spare)^[1]
Operation Temp: 20 - 100*C^[1]
N2 Flow Rate: 1.7 SCFM^[1]
Interior Chamber Dims: 18 x 18 x 12"^[1]
Chamber Material: 6061-T6 aluminum^[1]
SEMI Compliance: S2/S8^[1]; Performance^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Type of pumpsEdwards iXH100 Vacuum Pump^[1]
No. of Mass Flow Controllers3 optional, for gas mixing capability^[1]
No. of Process Gas Inputs3 standard^[1]
Type of Gases usedOxygen and Nitrogen^[1]
Process Gas Flow Rate20-50 SCCM average^[1]
Process Gas Inputs3 standard, 4th optional^[1]
RF Plasma Power0-1000 watts @ 550 VAC, selectable power^[1]
RF Leakage Magnetic0.6 mA/m, 4.15 x 10-7 A2/m2 Average^[1]
RF Leakage Electrical1.6 V/m, 4.2 V2/m2 Average^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the G 1000 LMC are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the G 1000 LMC are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the G 1000 LMC are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the G 1000 LMC are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the G 1000 LMC are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the G 1000 LMC is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources

[1]Inventory photo
[2]Yield Engineering Systems, Inc. (YES) > Applications > Polyimide Cure/Bake/Anneal > Fan Out Wafer Level Packaging — yieldengineering.com (Sep 3, 2020)web.archive.org