Waferpedia

YES

PB8

PB8 — web.archive.org
Fig. 01PB8web.archive.org[1]
  • Plate 01Yield Engineering YES-PB8-2HV-US Polyimide Bake Oven (ID# 4964)

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  • Plate 02Yield Engineering YES 450-PB8-2P-CP Polymid Bake Oven (ID# 4255)

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What is it?

The YES PB8 is a high temperature vacuum oven with a programmable temperature controller and programmed vacuum and nitrogen flow cycles. It features filtered heated nitrogen purging in laminar flow, and the source states it is used for curing polyimide, SU8, BCB, and other films.

What can it run?

Process applications and technology nodes documented for this tool.

  • Curing polyimide
  • Curing SU8
  • Curing BCB
  • Curing other films
  • Wafer dehydration
  • Getter activation
  • Metal annealing
  • Thermal treatment of thin film resistors

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • No low-temperature materials (unstable below 500C)
  • No high-vapor-pressure materials
  • Non-toxic and non-flammable gases/materials only

What do the numbers mean?

Vacuum & pumping1

Vacuum level
High vacuum; tool overview states 10^-5 Torr[1]
Accurate?

Wafer handling1

Capacity
Up to two boats of 8-inch wafers[2]
Accurate?

Gas & chemistry1

Gas/material compatibility
Non-toxic and non-flammable gases/materials only[2]
Accurate?

Configuration & options4

Ramp rate
1-5°C/min[2]
Accurate?
Cool-down rate
1-5°C/min[2]
Accurate?
Max temperature
450°C[2]
Accurate?
Idle temperature
50°C[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
YES-PB8 High VacDescribed as the PB8 high vacuum oven, with high vacuum specs listed for up to 200mm wafers.web.archive.org[1]
YES-PB8 High Vac SpecsListed as the PB8 high-vacuum configuration; source notes up to 200mm wafers.web.archive.org[1]
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What replaced it?

  • siblingYES PB12The PB-HV series page lists YES-PB12 High Vac Specs (up to 300mm wafers) alongside the PB8.source[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Gas/material compatibilityNon-toxic and non-flammable gases/materials only[2]
  • Vacuum levelHigh vacuum; tool overview states 10^-5 Torr[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the PB8 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PB8 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the PB8 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the PB8 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the PB8 are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the PB8 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.orgweb.archive.org
  2. [2]cnfusers.cornell.educnfusers.cornell.educnfusers.cornell.edu
  3. [3]Equipment Resources | CNFcnf.cornell.educnf.cornell.edu
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Last updated Jul 29, 2026.

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