YES
PB12
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Wafer size
300mm
Vacuum
high vacuum (10^-5)[1]
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- MEMS and semiconductor process applications
- Wafer dehydration
- Getter activation
- Metal annealing
- Thermal treatment of thin film resistors
What do the numbers mean?
Vacuum & pumping1
Wafer handling1
Configuration & options3
Vintage & configurations
What replaced it?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Vacuumhigh vacuum (10^-5)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the PB12 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PB12 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the PB12 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the PB12 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the PB12 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PB12 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
Last updated Jul 29, 2026.
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