Kurt Lesker
ALD-150LX alternatives
Comparable Deposition equipment documented in the Waferpedia catalog.
6 comparable tools
Kurt Lesker
150LX
150mm
Deposition
The Kurt Lesker ALD-150LX is a plasma-enhanced atomic layer deposition system with a load-locked process chamber and in situ ellipsometer, configured for up to 150 mm wafers.
ASM
Epsilon 2000
150mm
Deposition
Applied Materials
P5000
150mm
Deposition
Applied Materials P5000 PECVD is a deposition system with two dedicated dielectric PECVD chambers for silicon dioxide and silicon nitride films.
Temescal
Simba2
150mm
Deposition
Temescal
SuperSweep64
150mm
Deposition
Temescal SuperSweep64 is a programmable beam sweep controller named in the specifications for the FC-4400 deposition system.
Temescal
UEFC-4900
150mm
Deposition
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