Lam Research
2300 alternatives
Comparable Etch equipment documented in the Waferpedia catalog.
6 comparable tools
Oxford Instruments
Plasmalab 80 Plus RIE
8"
Etch
Oxford Instruments Plasmalab 80 Plus RIE is a reactive ion etcher with support for wafers up to 8 inches.
Lam Research
Rainbow 4520
8"
Etch
Lam Research Rainbow 4520 is a single-wafer plasma/RIE etching system described as part of the Rainbow 45XX series.
Oxford Instruments
100 ICP Fluorine
Etch
Tegal
1511e
three- to six-inch wafers
Etch
The Tegal 1511e is a tri-electrode dual-frequency plasma etch system for processing three- to six-inch wafers.
Lam Research
2300 e 4 Exelan Flex ES Dielectric
Etch
Lam Research
2300 e 4 Exelan Flex GX Dielectric
Etch
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