Waferpedia

Tool family

Applied Materials Mirra Mesa

Models in this family

  1. Applied Materials Mirra Mesa is a CMP (Chemical Mechanical Polisher) with a 4-head, 3-platen polisher system module.

  2. The Applied Materials Mirra Mesa CMP 5201 is a CMP polisher for 8-inch wafers with oxide, dry-in/dry-out configuration.

All entries

  1. Mirra MesaApplied Materials

    Applied Materials Mirra Mesa is a CMP (Chemical Mechanical Polisher) with a 4-head, 3-platen polisher system module.

    CategoryCMP
    20 specs
  2. Mirra Mesa CMP 5201Applied Materials

    The Applied Materials Mirra Mesa CMP 5201 is a CMP polisher for 8-inch wafers with oxide, dry-in/dry-out configuration.

    CategoryCMPWaferWafer loss sensor
    46 specs