Axcelis

GSD 200 E 2 Ion

Ion Implantation Axcelis GSD 200 family

Research Quality: 20% complete

LinkedIn X Email

GSD 200 E 2 Ion — Inventory photo — Fig. 01GSD 200 E 2 IonInventory photo^[1]

What is it?

What do the numbers mean?

Vacuum & pumping4

Beamline and Source Pumps^[1]
Source Turbo Pump (P1): STP H2000C^[1]
Beam Line Cryo Pump (P3): CTI Onboard 10^[1]
End Station Cryo Pump (P2): CTI Onboard 8^[1]

Wafer handling2

4-Cassette Capability^[1]

Accurate?

Automatic Flat or Notch Alignment Capability w/buffer cassette^[1]

Accurate?

Control & software2

Software Version 6.12.3^[1]

Accurate?

GEM/SECS Interface^[1]

Accurate?

Configuration & options12

High Current: GSD-200EE^[1]; Automated Beam tuning and Set-Up w/Eaton Autotune^[1]
Ion Source Type: ELS^[1]
Source Material Type: Moly^[1]; Signal Tower^[1]; Flag Faraday Injector^[1]; Direct Rotory Drive^[1]; Enhanced Low Energy Beamline^[1]; Process Disk w/Active Cooling & Chiller^[1]
Single Stage Extraction: 90keV^[1]
Beamline Version: Standard^[1]; Block Upgrade^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationBeamline and Source Pumps^[1]
Source Turbo Pump (P1)STP H2000C^[1]
Beam Line Cryo Pump (P3)CTI Onboard 10^[1]
End Station Cryo Pump (P2)CTI Onboard 8^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the GSD 200 E 2 Ion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the GSD 200 E 2 Ion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the GSD 200 E 2 Ion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the GSD 200 E 2 Ion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the GSD 200 E 2 Ion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the GSD 200 E 2 Ion is not on record.
Answerable by: an OEM datasheet or a fab qualification report