EV Group 850

Models in this family

1. 

   850 Debonder
2. 

   850 LT

   The EVG 850 LT is an 8-inch bonder with wafer ID reader, prebond, IR inspection, plasma activation, and automated handling features.

3. 850 LT SOI Fusion Wafer

   The EV Group 850 LT SOI Fusion Wafer Bonder is a fully automatic wafer bonder configured for 8-inch/200mm wafers.

4. 

   850 SOI Wafer

   The EVG 850 SOI Wafer Bonder is a fully automatic wafer bonder suitable for wafer sizes up to 6 inch/150mm and currently configured for 6 inch/150mm wafers.

5. 850 TBL
6. 

   850 Wafer