Hitachi Kokusai

Models in this family

1. Kokusai DD 803 V Annealing
2. Kokusai DD 812 V Diffusion

   The Hitachi Kokusai DD 812 V is a diffusion system designed for N2 anneal processing of 6-inch wafers.

3. 

   Kokusai DD 823 V Vertical Diffusion

   The Hitachi Kokusai DD 823 V is a vertical diffusion furnace for 8-inch wafers.

4. 

   Kokusai DD 853 V Vertical Diffusion

   The Hitachi Kokusai DD 853 V is a vertical diffusion furnace for oxidation, diffusion, and annealing.

5. 

   Kokusai DJ 1209 VC DMM
6. 

   Kokusai DJ 1223 V
7. Kokusai DJ 823 V 8 BL
8. Kokusai DJ 825 V 8 BL

   The Hitachi Kokusai DJ 825 V 8 BL is a 8-inch furnace with a low pressure vertical loadlock chamber, described as a batch furnace for 100 wafers and doped poly silicon.