Hitachi

Kokusai DD 823 V Vertical Diffusion

Thermal / Diffusion Hitachi Kokusai family

Research Quality: 30% complete

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Kokusai DD 823 V Vertical Diffusion — Inventory photo — Fig. 01Kokusai DD 823 V Vertical DiffusionInventory photo^[1]

What is it?

The Hitachi Kokusai DD 823 V is a vertical diffusion furnace for 8-inch wafers.

What do the numbers mean?

Wafer handling5

N2 Load Lock: Not Installed^[1]
Cassette I/O Type: SMIF^[1]
SMIF: Asyst / Indexer 2200^[1]; N2 Load Lock Not Installed^[2]
Cassette I/O Type: Normal I/O^[2]

Gas & chemistry1

Gas Controller: CX 3201 B^[1]

Control & software4

System Main Controller: CX 3002 A^[1]
Mechanical Controller: CX 1215-1, 1215-2^[1]
Sequence Controller: CX 1312^[1]
Furnace Temperature Controller: CQ 1600^[1]

Configuration & options14

Process: H2 Anneal^[1]
System Layout: Main, Utility^[1]
System Type: L Type^[1]; No Side Maintenance^[1]
System Paint Color: Ivory^[1]
Furnace Front Surface Finish: Painted^[1]
Rapid Cooling Unit: Not Installed^[1]
O2 Analyzer: Not Installed^[1]
AVG Compatibility: Unable^[1]
Gs Flow Chart Panel: Installed (Front)^[1]
Operational Panel: Installed (Front)^[1]
Signal Tower/ colors: Not Installed^[1]; Rapid Cooling Unit Not Installed^[2]; O2 Analyzer installed (LC-750)^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Gas ControllerCX 3201 B^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Kokusai DD 823 V Vertical Diffusion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Kokusai DD 823 V Vertical Diffusion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Kokusai DD 823 V Vertical Diffusion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Kokusai DD 823 V Vertical Diffusion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Kokusai DD 823 V Vertical Diffusion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Kokusai DD 823 V Vertical Diffusion is not on record.
Answerable by: an OEM datasheet or a fab qualification report