Hitachi

Kokusai DD 823 V Vertical Diffusion

Thermal / Diffusion Hitachi Kokusai family

Research Quality: 40% complete

The Hitachi Kokusai DD 823 V is a vertical diffusion furnace for 8-inch wafers. The DD 823 V is used for processes such as H2 anneal.^[1]^[2]

Kokusai DD 823 V Vertical Diffusion — Inventory photo — Fig. 01Kokusai DD 823 V Vertical DiffusionInventory photo^[1]

Power

Riken Keiki GD-D 8 V (H2)^[2]

Gas delivery

CX 3201 B^[1]

Optics

DN 150^[1]

What is it?

Applications

The DD 823 V is used for hydrogen anneal.^[1]^[2]

What do the numbers mean?

Power & electrical2

Gas detector (alternative): Riken Keiki GD-D 8 V (H2)^[2]
Model: DD 823 V^[1]

Wafer handling17

N2 Load Lock: Not Installed^[1]
Cassette I/O Type: SMIF^[1]
SMIF: Asyst / Indexer 2200^[1]; N2 Load Lock Not Installed^[2]
Cassette I/O Type: Normal I/O^[2]
Wafer Qty in Cassette: 26^[1]
Cassette Storage Qty: 24^[1]
Fork-Wafer Presence Sensor: Installed^[1]
Wafer size: 8 inch^[1]
Cassette I/O type: SMIF with Asyst/Indexer 2200^[1]
Cassette I/O type (alternative): Normal I/O^[2]
Wafer quantity per cassette: 26^[1]
Wafer quantity per cassette (alternative): 25^[2]
Cassette storage quantity: 24^[1]
Cassette storage quantity (alternative): 21^[2]
Auto wafer aligner: Not installed^[1]
Auto wafer aligner (alternative): Installed^[2]

Gas & chemistry8

Gas Controller: CX 3201 B^[1]
Gas Detector: Riken Keiki GD-V 11 D^[1]
Detecting Gas: H2^[1]
Process Gas: N2, H2^[1]
Basic Style (Gas System): Integrated Gas System (Fujikin)^[1]
Gas Controller: CX 2003 A^[2]
Gas detector: Riken Keiki GD-V 11 D (H2)^[1]
Gas system basic style: Integrated Gas System (Fujikin)^[1]

Optics & imaging1

Furnace Over-temp Detector: DN 150^[1]

Control & software10

System Main Controller: CX 3002 A^[1]
Mechanical Controller: CX 1215-1, 1215-2^[1]
Sequence Controller: CX 1312^[1]
Furnace Temperature Controller: CQ 1600^[1]
User Host Computer I/F: HSMS^[1]
System Main Controller: CX 2003 A^[2]
Sequence Controller: CX 1309 A^[2]
System main controller (alternative): CX 2003 A^[2]
Furnace temperature controller (alternative): CQ 1500 A^[2]
User host computer interface: HSMS^[1]

Configuration & options21

Process: H2 Anneal^[1]
System Layout: Main, Utility^[1]
System Type: L Type^[1]; No Side Maintenance^[1]
System Paint Color: Ivory^[1]
Furnace Front Surface Finish: Painted^[1]
Rapid Cooling Unit: Not Installed^[1]
O2 Analyzer: Not Installed^[1]
AVG Compatibility: Unable^[1]
Gs Flow Chart Panel: Installed (Front)^[1]
Operational Panel: Installed (Front)^[1]
Signal Tower/ colors: Not Installed^[1]; Rapid Cooling Unit Not Installed^[2]; O2 Analyzer installed (LC-750)^[2]
Host Communications: Yes^[1]
Fork Type: 1 + 4 (VAC)^[1]
Fork-Variable Pitch: Installed^[1]
Vintage (year): 1997^[1]
Vintage (year) (alternative): 1995^[2]
OEM: Hitachi Kokusai^[1]
Equipment type: Vertical Diffusion Furnace^[1]

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Tokyo Electron Alpha 8 SE D— Same function class: Thermal / Diffusion, nullCompare in depthsource^[3]
Tokyo Electron Telindy Plus I Rad Vertical— Same function class: Thermal / Diffusion, nullCompare in depthsource^[4]
Tokyo Electron Alpha 8 S Vertical— Same function class: Thermal / Diffusion, nullCompare in depthsource^[5]
Blue M DCC 8 500 G— Same function class: Thermal / Diffusion, nullCompare in depthsource^[6]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Gas ControllerCX 3201 B^[1]
Gas DetectorRiken Keiki GD-V 11 D^[1]
Detecting GasH2^[1]
Process GasN2, H2^[1]
Basic Style (Gas System)Integrated Gas System (Fujikin)^[1]
Gas ControllerCX 2003 A^[2]
Gas detectorRiken Keiki GD-V 11 D (H2)^[1]
Gas detector (alternative)Riken Keiki GD-D 8 V (H2)^[2]
Gas system basic styleIntegrated Gas System (Fujikin)^[1]
ModelDD 823 V^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the model name of this equipment?

The model is DD 823 V.^[1]^[2]^[7]^[8]

Who is the manufacturer of the DD 823 V?

The manufacturer is Hitachi Kokusai.^[1]^[2]^[7]^[8]

Not publicly documented

The following facts about the Kokusai DD 823 V Vertical Diffusion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Kokusai DD 823 V Vertical Diffusion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Kokusai DD 823 V Vertical Diffusion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Kokusai DD 823 V Vertical Diffusion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Kokusai DD 823 V Vertical Diffusion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Kokusai DD 823 V Vertical Diffusion is not on record.
Answerable by: an OEM datasheet or a fab qualification report