Hitachi
Kokusai DD 853 V Vertical Diffusion
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Hitachi Kokusai DD 853 V Vertical Diffusion is a vertical diffusion furnace. The Hitachi Kokusai DD 853 V Vertical Diffusion is used for oxidation, diffusion, and annealing. The Hitachi Kokusai DD 853 V Vertical Diffusion is specified for 8 inch wafers.[1][2]
What it is
The Hitachi Kokusai DD 853 V is a vertical diffusion furnace.[1][2]
How it works
General reference — not yet source-verifiedA vertical diffusion furnace processes wafers inside a heated vertical tube or chamber, where controlled thermal exposure drives oxidation, diffusion, and annealing steps.
Where it fits in the process flow
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Water marks inside and outside the unit
What do the numbers mean?
Power & electrical1
Wafer handling1
Optics & imaging1
Configuration & options6
- For oxidation, diffusion, and annealing[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ModelDD 853 V[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Kokusai DD 853 V Vertical Diffusion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Kokusai DD 853 V Vertical Diffusion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Kokusai DD 853 V Vertical Diffusion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Kokusai DD 853 V Vertical Diffusion are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Kokusai DD 853 V Vertical Diffusion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Kokusai DD 853 V Vertical Diffusion are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 16, 2026.
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