Tool family
The Hitachi S 4800 is a field emission scanning electron microscope with a cold field-emission source and 12-inch wafer capability.
The Hitachi S 4800 I is a scanning electron microscope with listed resolution, magnification, tilt motion, and Windows 2000 control software.
The Hitachi S 4800 II is a scanning electron microscope (SEM).
The Hitachi S 4800 is a field emission scanning electron microscope with a cold field-emission source and 12-inch wafer capability.
The Hitachi S 4800 I is a scanning electron microscope with listed resolution, magnification, tilt motion, and Windows 2000 control software.
The Hitachi S 4800 II is a scanning electron microscope (SEM).