Waferpedia

Tool family

Hitachi S 4800

Models in this family

  1. The Hitachi S 4800 is a field emission scanning electron microscope with a cold field-emission source and 12-inch wafer capability.

  2. The Hitachi S 4800 I is a scanning electron microscope with listed resolution, magnification, tilt motion, and Windows 2000 control software.

  3. The Hitachi S 4800 II is a scanning electron microscope (SEM).

All entries

  1. S 4800 FE-SEMHitachi

    The Hitachi S 4800 is a field emission scanning electron microscope with a cold field-emission source and 12-inch wafer capability.

    CategoryMetrology & Inspection
    5 specs
  2. S 4800 IHitachi

    The Hitachi S 4800 I is a scanning electron microscope with listed resolution, magnification, tilt motion, and Windows 2000 control software.

    CategoryMetrology & Inspection
    7 specs
  3. S 4800 IIHitachi

    The Hitachi S 4800 II is a scanning electron microscope (SEM).

    CategoryMetrology & Inspection
    14 specs
  4. S-4800Hitachi
    CategoryMetrology & Inspection
    3 specs