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Hitachi

S 4800 II

Metrology & InspectionHitachi S 4800 family
Research Quality: 30% complete
S 4800 II — Inventory photo
Fig. 01S 4800 IIInventory photo[1]

What is it?

The Hitachi S 4800 II is a scanning electron microscope (SEM).

What do the numbers mean?

Optics & imaging2

Secondary Electron Image Resolution:[2]
Accurate?
Magnification:[2]
Accurate?

Control & software2

Includes Installation CDs and software[1]
Accurate?
Operating System
Windows XP[2]
Accurate?

Configuration & options10

No HDD or EDX[1]
Accurate?
Process Type
FA-SEMs/TEMs/Dual Beams[2]
Accurate?
1.0nm (15kV, WD+4mm)[2]
Accurate?
1.4nm (1kV, WD=1.5mm, Deceleration mode)[2]
Accurate?
2.0nm (1kV, WD-1.5mm, Normal mode)[2]
Accurate?
LM mode
20 ~ 2,000X[2]
Accurate?
HM mode
100 ~ 800,000X[2]
Accurate?
Specimen Stage:[2]
Accurate?
5 Axis Stage Motorization[2]
Accurate?
Type KK
X: 0 ~ 110mm; Y: 0 ~ 110mm, Z: 1.5 ~ 40mm; T: -5 ~ +70*, R: 360*[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the S 4800 II are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 4800 II are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S 4800 II are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S 4800 II are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the S 4800 II are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the S 4800 II is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
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Last updated Jul 29, 2026.

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