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Hitachi

S 4800 I

Metrology & InspectionHitachi S 4800 family
Research Quality: 30% complete
S 4800 I — Inventory photo
Fig. 01S 4800 IInventory photo[1]

What is it?

The Hitachi S 4800 I is a scanning electron microscope with listed resolution, magnification, tilt motion, and Windows 2000 control software.

What do the numbers mean?

Power & electrical1

Resolution
1.0 nm (Accelerating voltage: 15 kV, WD: 4mm; 2.0 nm (Accelerating voltage: 1 kV, WD: 1.5 mm)[1]
Accurate?

Vacuum & pumping1

Main body
1set including Tip, Objective aperture, Ion Pump, SE detection etc.[1]
Accurate?

Optics & imaging1

Magnification
30 to 2,000x in LM mode; 100 to 800,000 in HM mode[1]
Accurate?

Control & software1

Diplay unit
1set including PC, monitor, keyboard, mouse, etc[1]
Accurate?

Configuration & options3

Chiller
Option if there is no water source[1]
Accurate?
Tilt motion:-5° to +70°[1]
Accurate?
Windows 2000[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Main body1set including Tip, Objective aperture, Ion Pump, SE detection etc.[1]
  • Resolution1.0 nm (Accelerating voltage: 15 kV, WD: 4mm; 2.0 nm (Accelerating voltage: 1 kV, WD: 1.5 mm)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the S 4800 I are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 4800 I are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S 4800 I are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S 4800 I are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the S 4800 I are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the S 4800 I is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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