Hitachi
S 4800 FE-SEM
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Hitachi S 4800 is a field emission scanning electron microscope manufactured by Hitachi. The Hitachi S 4800 features a cold field-emission source for high-resolution imaging. The Hitachi S 4800 is capable of processing 12-inch wafers.[1][2]
What it is
The Hitachi S 4800 FE-SEM employs a cold field-emission source. The system is equipped with a scanning transmission electron microscope (STEM) detector and an energy dispersive X-ray (EDX) detector for compositional analysis.[2]
How it works
The Hitachi S 4800 uses a cold field-emission source, which operates at room temperature and provides high brightness and small energy spread. The instrument includes both a STEM detector for transmitted electron imaging and an EDX detector for energy-dispersive X-ray spectroscopy.[2]
What do the numbers mean?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What kind of instrument is the Hitachi S 4800?
It is a field emission scanning electron microscope (FE-SEM).[1]
What manufacturer and model are identified?
The manufacturer is Hitachi and the model is S 4800.[1]
Not publicly documented
The following facts about the S 4800 FE-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 4800 FE-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 4800 FE-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 4800 FE-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 4800 FE-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 4800 FE-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]nanofab.ualberta.ca — nanofab.ualberta.cananofab.ualberta.ca
- [3]Inventory photo
- [4]Inventory photo
Last updated Sep 1, 2026.
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