Tool family
Lam Research Rainbow
Models in this family
The Lam Rainbow 4528 I is a plasma etcher configured for 8-inch wafers.
The Lam Rainbow 9600 SE II TCP is a plasma etcher described with 6-inch wafer size.
All entries
- Rainbow 4506 ILam ResearchCategoryEtch20 specs
- Rainbow 4528 ILam Research
The Lam Rainbow 4528 I is a plasma etcher configured for 8-inch wafers.
CategoryEtch18 specs - Rainbow 9600 SE II TCPLam Research
The Lam Rainbow 9600 SE II TCP is a plasma etcher described with 6-inch wafer size.
CategoryEtch20 specs