Lam Research

Rainbow 4528 I

Etch Lam Research Rainbow family

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Rainbow 4528 I — Inventory photo — Fig. 01Rainbow 4528 IInventory photo^[1]

Power

Paramount 1213 / Paramount MF 3KW^[1]

Gas delivery

Ar: 500 sccm^[1]

What is it?

The Lam Rainbow 4528 I is a plasma etcher configured for 8-inch wafers.

What do the numbers mean?

Power & electrical2

RF: Paramount 1213 / Paramount MF 3KW^[1]; RF Cart^[1]

Wafer handling2

Robot: Harmonic Drive^[1]
Loader: Hine Indexers 38A^[1]

Gas & chemistry9

GAS 1: Ar: 500 sccm^[1]
GAS 2: CF4: 200 sccm^[1]
GAS 3: CHF3: 100 sccm^[1]
GAS 4: SF6: 100 sccm^[1]
GAS 5: N2: 100 sccm^[1]
GAS 6: O2: 100 sccm^[1]
GAS 7: He: 1000 sccm^[1]
GAS 8: NF3: 1000 sccm^[1]
GAS 10: O2: 100 sccm^[1]

Control & software2

Software: Envision 1.5.2^[1]
Controllers: AC2G controller ISO THV / AC2 main chamber THV^[1]

Configuration & options3

ISO Module^[1]
AC Box: 002 (breakers)^[1]; AC Rack on mezzanine^[1]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

RFParamount 1213 / Paramount MF 3KW^[1]
ConfigurationRF Cart^[1]
GAS 1Ar: 500 sccm^[1]
GAS 2CF4: 200 sccm^[1]
GAS 3CHF3: 100 sccm^[1]
GAS 4SF6: 100 sccm^[1]
GAS 5N2: 100 sccm^[1]
GAS 6O2: 100 sccm^[1]
GAS 7He: 1000 sccm^[1]
GAS 8NF3: 1000 sccm^[1]
GAS 10O2: 100 sccm^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Rainbow 4528 I are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 4528 I are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 4528 I are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 4528 I are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 4528 I are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 4528 I is not on record.
Answerable by: an OEM datasheet or a fab qualification report