Lam Research

Rainbow 4506 I

Etch Lam Research Rainbow family

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Rainbow 4506 I — Inventory photo — Fig. 01Rainbow 4506 IInventory photo^[1]

Power

PDW2200 400Kc generator (main chamber)^[1]

Vacuum

No^[1]

Gas delivery

Ar: 500 sccm^[1]

What is it?

What do the numbers mean?

Power & electrical3

RF: PDW2200 400Kc generator (main chamber)^[1]; RFG1250 13.56MHz (ISO chamber)^[1]; RF Cart^[1]

Vacuum & pumping1

Turbo pumps: No^[1]

Wafer handling4

Wafer type: Jeida flat^[1]
Robot type: Harmonic Drive^[1]
Loader type: Hine indexers 38A^[1]
Loadlock: Entrance (ISO chmbr) and Exit LL^[1]

Gas & chemistry6

GAS 1: Ar: 500 sccm^[1]
GAS 2: CF4: 100 sccm^[1]
GAS 3: CHF3: 50 sccm^[1]
GAS 4: He: 1000 sccm^[1]
GAS 5: O2: 20 sccm^[1]
GAS 6: N2: 540 sccm^[1]

Control & software2

Software: Classic 7.31-42^[1]
Controllers: VAT controller ISO THV / AC4 controller main chamber THV^[1]

Configuration & options4

Oxide Etch^[1]
Valve type: AC4 Throttle / VAT Throttle^[1]; Monochromator Endpoint^[1]; ISO Module^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

RFPDW2200 400Kc generator (main chamber)^[1]
ConfigurationRFG1250 13.56MHz (ISO chamber)^[1]
ConfigurationRF Cart^[1]
Turbo pumpsNo^[1]
GAS 1Ar: 500 sccm^[1]
GAS 2CF4: 100 sccm^[1]
GAS 3CHF3: 50 sccm^[1]
GAS 4He: 1000 sccm^[1]
GAS 5O2: 20 sccm^[1]
GAS 6N2: 540 sccm^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Lam Rainbow 4506 I?

It is a plasma etcher.^[1]

Not publicly documented

The following facts about the Rainbow 4506 I are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 4506 I are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 4506 I are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 4506 I are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 4506 I are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 4506 I is not on record.
Answerable by: an OEM datasheet or a fab qualification report