Lam Research
Rainbow 9600 SE II TCP
What it is
The Rainbow 9600 SE II TCP designation refers to the inductively coupled plasma (TCP) etch architecture employed by the system. The system is equipped with an electrostatic chuck having a coated aluminum surface. The configuration includes a DSQ feature and a dual endpoint detector based on a monochromator.[1][2]
How it works
The Rainbow 9600 SE II TCP generates plasma using three onboard RF generators, which supply power for the top electrode, the bias electrode, and the DSQ function. The tool relies on Alcatel ATH 1300 MT turbo pumps for vacuum pumping, with an Adixen Magpower controller for the turbo pump. A VAT pendulum valve of the 65 Series controls chamber pressure, managed by a VAT PM 7 controller.[1][2]
Wafer handling is performed by a Harmonic Drive robot and Hine Indexers 38 A loaders. The tool uses flat wafers, which are transported from the loader to the process chamber. A 12-channel Anafaze temperature controller and an AC 2 controller for the throttle valve support process control.[1][2]
Endpoint detection is provided by a dual endpoint detector using a monochromator, identified by Lam part number 853 001983 110. Software for the system is version E 2.0.1-044. A manual WVDS controller is also part of the control system.[1][2]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Bulkhead wall facia are missing
What do the numbers mean?
Power & electrical1
Vacuum & pumping4
- Adixen Magpower (Turbo Pump)[1]
Wafer handling4
Optics & imaging4
Control & software9
Configuration & options17
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Rainbow 9600 SE II TCP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 9600 SE II TCP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 9600 SE II TCP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 9600 SE II TCP are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Rainbow 9600 SE II TCP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Rainbow 9600 SE II TCP are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 16, 2026.
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