Lam Research

Rainbow 9600 SE II TCP

Etch Lam Research Rainbow family

Research Quality: 30% complete

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Rainbow 9600 SE II TCP — Inventory photo — Fig. 01Rainbow 9600 SE II TCPInventory photo^[1]

What is it?

The Lam Rainbow 9600 SE II TCP is a plasma etcher described with 6-inch wafer size.

What do the numbers mean?

Power & electrical1

RF: 3X on Board Trumpf Generators (Top, Bias, DSQ)^[1]

Vacuum & pumping2

Turbo Pumps: Alcatel ATH 1300 MT^[1]; Adixen Magpower (Turbo Pump)^[1]

Wafer handling3

Wafer Type: Flat^[1]
Robot Type: Harmonic Drive^[1]
Loader Type: Hine Indexers 38 A^[1]

Optics & imaging1

Monochromator Endpoint: Dual Endpoint Detector - Lam # 853 001983 110^[1]

Control & software5

Software: E 2.0.1-044^[1]; 12 CH Anafaze Temp Controller^[1]; AC 2 Controller (Throttle Valve)^[1]; VAT PM 7 Controller ( VAT Pendulum Valve)^[1]; Manual WVDS Controller^[1]

Configuration & options8

With DSQ^[1]; Convertible to 8"^[1]
Vlave Type: VAT Pendulum Valve 65 Series^[1]
SMIF: No^[1]; Coated Aluminum ESC - Lam # 718 094756 061^[1]
Bulkhead: Wall Facia are Missing^[1]
Cart: No^[1]; Controllers:^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

RF3X on Board Trumpf Generators (Top, Bias, DSQ)^[1]
Turbo PumpsAlcatel ATH 1300 MT^[1]
ConfigurationAdixen Magpower (Turbo Pump)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Rainbow 9600 SE II TCP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 9600 SE II TCP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 9600 SE II TCP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 9600 SE II TCP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 9600 SE II TCP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 9600 SE II TCP is not on record.
Answerable by: an OEM datasheet or a fab qualification report