Onto Innovation NSX 105

Models in this family

1. 

   NSX 105

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   NSX 105	—	2003–2007	Source records describe configurations including 1 chamber / 2LP, load ports for 6" and 8", Brooks robot and aligner, 12" wafer stage, and CCD 3D camera options, with vintages stated as 2003, 2004, and 2007.	Equipment inventory listing[1]

2. 

   NSX 105 Automated Wafer, Die & Bump

   The NSX 105 is an automated wafer, die, and bump inspection system.

3. 

   NSX 105 D Automated Wafer, Die & Bump

   The ONTO / Rudolph / August NSX 105 D is an automated wafer, die, and bump inspection system.

4. NSX 105 Wafer

Sources