Waferpedia

Tool family

Ontrak DSS 200

Ontrak5 entries

Models in this family

  1. DSS 200 Series II Postintroduced 2023

    The Ontrak DSS 200 Series II Post CMP Scrubber is a post-CMP scrubber for 8-inch wafers.

  2. The Ontrak DSS 200 Series II Wafer Scrubber is a wafer scrubber specified for 6-inch wafers.

All entries

  1. DSS 200 Series II PostOntrak

    The Ontrak DSS 200 Series II Post CMP Scrubber is a post-CMP scrubber for 8-inch wafers.

    CategoryCMP
    24 specs
  2. DSS 200Ontrak
    1 spec
  3. DSS 200 PostOntrak
    CategoryCMP
    2 specs
  4. DSS 200 Series II WaferOntrak

    The Ontrak DSS 200 Series II Wafer Scrubber is a wafer scrubber specified for 6-inch wafers.

    CategoryWet Processing / Clean
    1 spec
  5. DSS 200 SynergyOntrak
    CategoryWet Processing / Clean
    12 specs