Ontrak DSS 200

Models in this family

1. 

   DSS 200 Series II Postintroduced 2023

   The Ontrak DSS 200 Series II Post CMP Scrubber is a post-CMP scrubber for 8-inch wafers.

2. 

   DSS 200

   The Ontrak DSS 200 is a semiconductor manufacturing system that processes 8-inch wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   OnTrak DSS 200 Series 1	—	—	Double-sided PVA scrubber designed to clean 100mm to 200mm wafers.	axustech.com[1]
   OnTrak DSS 200 Series 2	—	—	Double-sided PVA scrubber with throughputs of 45-65 wafers per hour and wafer sizes from 100mm to 200mm.	axustech.com[2]

3. 

   DSS 200 Post

   The Ontrak DSS 200 Post is a double-sided PVA post-CMP wafer scrubber. The Ontrak DSS 200 Post is configured for wafers from 100mm to 200mm.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Ontrak DSS200 Series 1	—	—	Designed to clean 100mm to 200mm wafers and has a universal load station.	axustech.com[1]
   Ontrak DSS200 Series 2	—	—	Offers production-proven cleaning results, throughputs of 45-65 wafers per hour, and a 200mm ergonomic load station.	axustech.com[2]
   DSS-200 Series 1	—	—	Designed to clean 100mm to 200mm wafers; standard features include universal load station, double-sided PVA scrub, dual brush boxes, ammonia dispense, IR assisted spin dry station, robotic unload, vertical unload station, touchscreen controls.	axustech.com[1]
   DSS-200 Series 2	—	—	Double-sided PVA scrubber offering 45-65 wafers per hour throughput; 200mm ergonomic load station, dark plastic covers protect light sensitive wafers, dual brush boxes, ammonia dispense, IR assisted spin dry station, robotic unload, vertical unload station, touchscreen controls.	axustech.com[2]
   DSS-200 CE	—	—	Entrepix table lists Entrepix Series 2 CE with brush scrub, roller PVA brush, downforce control, optional edge scrub, optional MegPie megasonic transducer, optional megasonic nozzle, optional high-pressure DI water spray, optional heated DI water feed, spin + heat lamp drying, NH4OH, dHF, SC-1 pre-diluted, SC-2 citric-based, backside chemical, metal CMP cleans, STI CMP cleans.	entrepix.com[3]
   Entrepix Synergy	—	—	Entrepix table lists Synergy with brush scrub, roller PVA brush, downforce control, optional accessories, spin + heat lamp drying, NH4OH, dHF, SC-1 pre-diluted, SC-2 citric or HCL-based, backside chemical, metal CMP cleans, STI CMP cleans.	entrepix.com[3]
   Entrepix Integra	—	—	Entrepix table lists Integra with integrated cleaning, brush scrub, roller PVA brush, downforce control, optional accessories, spin + heat lamp drying, NH4OH, dHF, SC-1 pre-diluted, SC-2 citric or HCL-based, backside chemical, metal CMP cleans, STI CMP cleans, double contained process area.	entrepix.com[3]

4. DSS 200 Series II Wafer

   The Ontrak DSS 200 Series II Wafer Scrubber is a wafer scrubber specified for 6-inch wafers.

5. 

   DSS 200 Synergy

   The Ontrak DSS 200 Synergy is a wet processing system for semiconductor manufacturing. The Ontrak DSS 200 Synergy is configured for 100-200mm substrate processing.

Sources