Waferpedia

Ontrak

DSS 200 Series II Wafer

Wet Processing / CleanOntrak DSS 200 family
Research Quality: 40% complete
Email

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

OntrakDSS 200 Series II Wafer
No photo available yet

Power

50/60 Hz[1]

Vacuum

80-100 PSI[1]

What it is

The Ontrak DSS 200 Series II is a wafer scrubber for semiconductor wet processing and clean operations.[2][1]

The Ontrak DSS 200 Series II Post CMP Scrubber is used for cleaning wafers after chemical mechanical polishing.[1]

How it works

General reference — not yet source-verified

Post-CMP scrubbers remove slurry residue and other contaminants from wafers after chemical mechanical polishing.

A post-CMP scrubber typically combines liquid delivery, mechanical scrubbing, rinsing, and drain handling to clean the wafer surface before the next process step.

Applications

The Ontrak DSS 200 Series II is used in semiconductor manufacturing for post-CMP wafer cleaning.[1]

The Ontrak DSS 200 Series II processes 8-inch wafers.[1]

What do the numbers mean?

Power & electrical3

Frequency
50/60 Hz[1]
Accurate?
Breaker
25 A (5.2 kW)[1]
Accurate?
Total FLA
6.8 A (1.4 kW)[1]
Accurate?

Vacuum & pumping3

CDA inlet pressure
80-100 PSI[1]
Accurate?
DI water inlet pressure
60-80 PSI[1]
Accurate?
Process solutions / chems inlet pressure
15 PSI[1]
Accurate?

Wafer handling6

Model
DSS 200 Series II Wafer[2]
Accurate?
Equipment type
Wafer Scrubber[2]
Accurate?
Wafer sizes
6 inch[2]
Accurate?
Application
cleaning wafers after chemical mechanical polishing[1]
Accurate?
Wafer size
8 inch[1]
Accurate?
Tool type
Wafer Scrubber[2]
Accurate?

Configuration & options7

Post CMP[2]
Accurate?
Make
Ontrak[2]
Accurate?
Tool description
post-CMP semiconductor process tool[1]
Accurate?
Process use
Post CMP[2]
Accurate?
Introduced
2023[1]
Accurate?
Power
200 / 208 / 220 VAC[1]
Accurate?
Noise level during process
70 dB[1]
Accurate?

Vintage & configurations

  1. 2023Introduced[1]

    DSS 200 Series II Post CMP is introduced in 2023.

Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Frequency50/60 Hz[1]
  • Breaker25 A (5.2 kW)[1]
  • Total FLA6.8 A (1.4 kW)[1]
  • CDA inlet pressure80-100 PSI[1]
  • DI water inlet pressure60-80 PSI[1]
  • Process solutions / chems inlet pressure15 PSI[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What process is the Ontrak DSS 200 Series II used for?

The Ontrak DSS 200 Series II is used for post-CMP wafer cleaning.[1]

Not publicly documented

The following facts about the DSS 200 Series II Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the DSS 200 Series II Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DSS 200 Series II Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DSS 200 Series II Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DSS 200 Series II Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the DSS 200 Series II Wafer are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]inventory listing
Was this page accurate?

Last updated Oct 12, 2026.

Compare with similar tools

View all →