Tokyo Electron P 12

Models in this family

1. 

   P 12
2. P 12 Precio

   The Tokyo Electron P 12 Precio is a prober with room/hot chuck and WAT docking.

3. 

   P 12 XL

   Tokyo Electron P 12 XL is a test and probe system used for electrical evaluation of semiconductor devices and wafers. Machines of this class are used to contact device pads or probe sites and measure circuit behavior before downstream assembly or final release.

4. 

   P 12 XL Wafer

   The Tokyo Electron P 12 XL Wafer Prober is a fully automatic wafer prober for 12-inch wafers.

5. 

   P 12 XLn

   Tokyo Electron P 12 XLn is a test and probe system. Machines of this class are used to contact semiconductor devices or wafers and collect electrical measurements for inspection and characterization.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   P 12 XLn+	—	2006–2007	Sources state different configurations, including wafer sizes 8 and 12 inch, GPIB interface, temperature range -40 ~ 150 C, and options such as Hot Temp Controller, WAPP Option, Combo350 Interface, Standard Foub Loader, Standard Upper / Low Pincette, and No SACC.	Equipment inventory listing[1]
   P 12 XLn+ Prober	—	2006–2007	Sources distinguish 2006 and 2007 vintage entries; one entry says it may be used for logic, another says it may be used for memory, and one lists options including nickel chuck top, hot temp controller, GPIB interface, WAPP option, Combo350 interface, standard foub loader, standard upper / low pincette, and no SACC.	Equipment inventory listing[2]

6. 

   P 12 XLn+ Automatic Wafer

   The Tokyo Electron P 12 XLn+ is an automatic wafer prober.

Sources