Precision optics

The SCIEX API 3000 is a triple quadrupole LC/MS/MS mass spectrometer used for analytical applications such as protein and peptide analysis, small molecule drug metabolism studies, and pharmacokinetic screening.

The Bruker Contour R1 is a 3D optical metrology system used for non-contact surface characterization.

The SCIEX API 2000 is a compact triple-quadrupole LC/MS/MS system introduced in 1998.

The Perkin Elmer 1050 UV-VIS Spectrometer is an instrument used for analyzing ultraviolet and visible light absorption spectra.

The Zygo Zegage 3D Optical Surface Profiler is a non-contact optical profiler for measuring surface topography.

The Agilent 11980 A is a Fiber Optic Interferometer covering the wavelength range of 1250-1600 nm.

The Varian 640 IR is a Fourier Transform Infrared (FT-IR) spectrometer designed for mid-IR and near-IR spectroscopy.

The Zygo GPI XP Interferometer is a phase-modulating interferometer for noncontact measurement of flat or spherical surfaces and transmitted wavefront measurement of optical components.

The Newport 8000 is a four-bay modular controller mainframe for laser diode driving, thermoelectric temperature control, device characterization, and automated photonics testing.

The Keysight 5517A is a Class II helium-neon laser source providing stable 633 nm wavelength light for precision dual-frequency interferometry.

The J.A. Woollam RC2 is a spectroscopic ellipsometer used to measure thin-film thickness and refractive indices.

The Zygo 8070-0159-02 / 7712 is an interferometer laser compatible with Canon FPA 5000 and FPA 6000.

The Keysight / Agilent 5517 B is an interferometer laser.

The Bruker / Veeco Dimension Fastscan is an atomic force microscope with stated scan, noise, stage, optics, software, and AFM mode specifications.

ASML model 4022.631.1584 is an Optical Gas Analyzer.

The Veeco AP 300 E Lithography System is a lithography tool with 2.0 µm resolution, extended-field ghi-line broadband optics, and handling features for 200 mm and 300 mm wafers including warped wafer handling to 500 µm.

General referenceSUSS MicroTec Mask is a wet processing and cleanroom class machine used for handling masks and related patterning hardware in semiconductor or precision optics manufacturing. It belongs to the class of equipment that supports mask cleaning, inspection, and preparation before use in downstream lithography or related process steps.

The FilMetrics F20-UV is an optical measurement instrument listed in EPFL's Center of MicroNanoTechnology equipment pages.

Agilent 7500 Series ICP-MS Metals Analyzer is an inductively coupled plasma mass spectrometer used for metals analysis.

The Onto Innovation MetaPulse 200 XCu Metal Film Measurement System is a contactless metal thickness measurement tool with wafer mapping, micro spot optics, multi-layer film capacity, and a PC controller.

The SCIEX Triple Quad 5500 LC-MS is a liquid chromatography–mass spectrometry system identified by SCIEX model Triple Quad 5500.

CyberOptics SQ 3000 3D AOI / SPI is an automated optical inspection and solder paste inspection system.

SCIEX Triple Quad 6500 is a liquid chromatography–mass spectrometry system.

Newport Integrity 1 VCS Vibration Isolation Optical Table is an optical table with integrated damping and vibration-isolation features.