Applied Materials
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During operation, a stepper aligns a photomask above a substrate. The substrate is coated with a photosensitive resist. A light source illuminates the mask, exposing the resist in the open areas. The substrate is then moved, and the process repeats until the entire substrate is exposed.
A scanner uses a precisely controlled beam of light to write the pattern directly onto the resist. The beam is focused to a small spot and moved across the substrate in a raster pattern, creating the desired features.
In a semiconductor fabrication line, lithography equipment is used after the substrate has been cleaned and coated with a photosensitive resist. After exposure, the substrate moves to a developing step where the imprinted pattern becomes visible, followed by etching or deposition to transfer the pattern into the substrate layers.
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The Applied Materials 5500 100 D is a stepper and scanner used in lithography.[1][2]
The Applied Materials 5500 100 D was manufactured by Applied Materials.[1][2]
The 5500 100 D is categorized as lithography equipment.[2]
The following facts about the 5500 100 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5500 100 D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 5500 100 D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 5500 100 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 5500 100 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 5500 100 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 1, 2026.
Brooks 017-0146-01 is a prealigner manufactured by Brooks.
The Ultratech 1000 Family is a photolithography step-and-repeat 1X steppers family using the Wynne Dyson optical design.
The EVG 101 is an advanced resist processing system for spin or spray coating and developing of wafers up to 300 mm.