Waferpedia

Applied Materials

Centura

DepositionApplied Materials Centura family
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Centura — Inventory photo
Fig. 01CenturaInventory photo[1]

What it is

General reference — not yet source-verified

Applied Materials Centura is a deposition machine class used to place thin material layers onto wafers under controlled process conditions. Machines of this class are part of the equipment set used to build the layered structures that make up integrated circuits and related devices.

Such systems are designed to handle film formation with controlled atmosphere, substrate motion, and process sequencing. In general, deposition tools of this type are used when a manufacturing flow needs a uniform coating, a conductive layer, an insulating layer, or a functional film with defined material properties.

How it works

General reference — not yet source-verified

The wafer is held in a controlled environment so that temperature, pressure, gas composition, and exposure time can be managed during film growth. This control allows the machine class to create thin layers with repeatable composition, thickness, and coverage behavior across a wafer surface.

Where it fits in the process flow

General reference — not yet source-verified

Deposition tools in this class are used early and repeatedly in semiconductor process flows, because many device structures depend on stacked layers that must be added, patterned, and then built upon by later steps.

Applications

General reference — not yet source-verified

This class of machine is generally used to deposit conductive, dielectric, barrier, seed, and other functional films needed in integrated circuit fabrication. It is also used in related precision manufacturing processes where controlled thin-film formation is required.

  • Chemical vapor deposition
  • Plasma etching

What do the numbers mean?

Configuration & options4

Ultima+ HDP[6]
Accurate?
3 C/H, DxZ[7]
Accurate?
3 C/H, EMAX CT Plus[8]
Accurate?
SIGEN 4CH[9]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Ultima+ HDP2002Equipment inventory listing[6]
3 C/H, DxZ2000Equipment inventory listing[7]
SIGEN 4CHEquipment inventory listing[9]
Centura CVD (Chemical Vapor Deposition)2000Listed with product details including 8" Ultima+ HDP, 8" 3 C/H DxZ, and 12" SIGEN 4CH.Equipment inventory listing[6]
Centura Etcher2003Listed as an etcher variant with 12" wafer size and EMAX CT Plus.Equipment inventory listing[8]
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Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • Applied Materials Centura PCB BoardsIn Productionsource[10]
  • Applied Materials Centura Spare PartsIn Productionsource[11]
  • Applied Materials Centura PCB BoardIn Productionsource[12]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of equipment class is Applied Materials Centura?General reference — not yet source-verified

It is a deposition system class used to form thin films on wafers in semiconductor manufacturing.

What is the main purpose of a deposition tool of this class?General reference — not yet source-verified

Its main purpose is to create controlled material layers that become part of the device structure.

Where does this class fit in a fabrication flow?General reference — not yet source-verified

It fits in the layer-building portion of the flow, where films are added before later patterning and integration steps.

What kinds of films are typically made with this class of equipment?General reference — not yet source-verified

Machines of this class are used for a range of functional films, including conductive, insulating, barrier, and seed layers.

Not publicly documented

The following facts about the Centura are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Centura are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly hosted manuals, SOPs, or datasheets for the Centura are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (15)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]inventory listing
  9. [9]inventory listing
  10. [10]Equipment inventory listing
  11. [11]Equipment inventory listing
  12. [12]Equipment inventory listing
  13. [13]Equipment inventory listing
  14. [14]Equipment inventory listing
  15. [15]Fab.nano Equipment Rates START.nano March 2026 0nanousers.mit.edunanousers.mit.edu
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Last updated Jul 29, 2026.

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