Applied Materials

Centura 5200

Deposition Applied Materials Centura 5200 family

Research Quality: 20% complete

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Centura 5200 — Inventory photo — Fig. 01Centura 5200Inventory photo^[1]

Power

RF Plasma^[2]

Vacuum

Ebara A 10 W Buffer Chamber Pump^[2]

Gas delivery

2 populated out of 4 available^[1]

What is it?

What do the numbers mean?

Power & electrical1

Chamber Clean Process: RF Plasma^[2]

Vacuum & pumping4

Ebara A 10 W Buffer Chamber Pump^[2]; Ebara A 70 W WXZ Backing Pump^[2]; Ebara A 10 W Loadlocks Backing Pump^[2]
Backside Pressure Control: MKS 1170 Argon 2SLM^[2]

Wafer handling2

Loadlock Type: Narrow Body - Auto Tiltout^[2]
Buffer Robot: Single Blade HP+^[2]

Gas & chemistry2

Gas boxes: 2 populated out of 4 available^[1]
Gas Panel Type: Seriplex^[2]

Configuration & options7

Process chamber: 5200 WxZ CVD^[1]; Mainframe^[1]
Light Tower: Four Color Tower^[2]; Chamber A & B:^[2]
Chamber Process Type: WxZ^[2]
Lid Assembly: Enhanced Cooled Lid^[2]
Heater Type: AL W/Ceramic Purge Ring^[2]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Centura 5200 PECVD	—	—	PECVD configuration; source states 8-inch wafers and lists associated chamber and subsystem details.	Equipment inventory listing^[2]
Centura 5200 CVD	—	—	CVD configuration.	Equipment inventory listing^[5]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Gas boxes2 populated out of 4 available^[1]
Gas Panel TypeSeriplex^[2]
ConfigurationEbara A 10 W Buffer Chamber Pump^[2]
ConfigurationEbara A 70 W WXZ Backing Pump^[2]
ConfigurationEbara A 10 W Loadlocks Backing Pump^[2]
Chamber Clean ProcessRF Plasma^[2]
Backside Pressure ControlMKS 1170 Argon 2SLM^[2]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Centura 5200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura 5200 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Centura 5200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura 5200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura 5200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Centura 5200 are on record.
Answerable by: an OEM parts catalog or a service engineer