Waferpedia

Applied Materials

Centura AP Enabler Dielectric

Centura AP Enabler Dielectric — Inventory photo
Fig. 01Centura AP Enabler DielectricInventory photo[1]

Wafer size

Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch

Vacuum

SMC pressure switch[1]

What is it?

Applied Materials Centura AP Enabler Dielectric Etcher is a 300 mm dielectric etcher with GEM/CIM JGJ online connection and a 3 carrier stage interface.

What do the numbers mean?

Vacuum & pumping6

Facility Plate
N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard[1]
Accurate?
SMC pressure switch[1]
Accurate?
Facility Plate
Pressure Gauge : Supplied by customer on regulator in floor[1]
Accurate?
Transfer Pressure Monitor
10 Torr Manometer and 1SLM N2 APC, kit[1]
Accurate?
Transfer Pressure Monitor
GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog[1]
Accurate?
Load Lock Pressure Monitor
GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog[1]
Accurate?

Wafer handling4

Wafer Size
Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch[1]
Accurate?
Inter Face
3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant[1]
Accurate?
Loader Mod Corrosion Prevent
N/A[1]
Accurate?
Transfer Chamber Blade Kit
Transfer Chamber Accelerator Blade Kit[1]
Accurate?

Control & software2

Online Connection
GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)[1]
Accurate?
Interface A
Hardware related to EDA[1]
Accurate?

Configuration & options8

HDD not included[1]
Accurate?
MENV and FMS assemblies[1]
Accurate?
Corrosion Resistant FI & SWLL
N/A[1]
Accurate?
Standard SWLL
Standard SWLL[1]
Accurate?
Side Storage Pod
Side Storage Pod (Left/Right)[1]
Accurate?
OCR
KIT, YAT BACKSIDE OCR, 300MM 5.3FI[1]
Accurate?
Facility Plate
Manual Valve : Supplied by customer in floor[1]
Accurate?
LL ISO-Slit Valve Grp Elast.
AP Chemraz 513 Elastomer[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Facility PlateN2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard[1]
  • ConfigurationSMC pressure switch[1]
  • Facility PlatePressure Gauge : Supplied by customer on regulator in floor[1]
  • Transfer Pressure Monitor10 Torr Manometer and 1SLM N2 APC, kit[1]
  • Transfer Pressure MonitorGAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog[1]
  • Load Lock Pressure MonitorGAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Centura AP Enabler Dielectric are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura AP Enabler Dielectric are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Centura AP Enabler Dielectric are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Centura AP Enabler Dielectric are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura AP Enabler Dielectric are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura AP Enabler Dielectric is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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