Waferpedia

Applied Materials

Centura I P 2 DPS

DepositionApplied Materials Centura family
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What it is

The Applied Materials Centura I P 2 DPS is a semiconductor deposition tool. The model name includes Decoupled Plasma Source, which places it in a plasma-assisted deposition class.[1]

How it works

General reference — not yet source-verified

A plasma-assisted deposition tool uses plasma energy to support film formation on a wafer surface. The decoupled-plasma architecture separates plasma generation from wafer-side process conditions so the process can control film growth and plasma action with more independence than a directly coupled arrangement.

A deposition chamber presents process gases to the wafer surface while the plasma activates those gases. The wafer receives a thin film on its surface as the process repeats under controlled chamber conditions.

Where it fits in the process flow

General reference — not yet source-verified

The Centura I P 2 DPS belongs in the deposition segment of semiconductor fabrication. Deposition follows earlier wafer preparation and pattern-definition steps and precedes later etch or planarization steps in many process flows.

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[2]
Accurate?

Configuration & options6

R1 Metal 2CH ASP+ 2CH[1]
Accurate?
OEM
Applied Materials[2]
Accurate?
Model
Centura I P 2[1]
Accurate?
Full designation
Applied Materials Centura I P 2 DPS (Decoupled Plasma Source)[2]
Accurate?
Category
Deposition[2]
Accurate?
Process description
R1 Metal 2CH ASP+ 2CH[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Centura I P 2 DPS, 8" R1 Metal 2CH ASP+ 2CH 2002 Vintage—2002The source states this example is a 2002 vintage unit and includes the descriptors 8" R1 Metal 2CH ASP+ 2CH.Equipment inventory listing[1]
Centura I P 2 DPS, 8" R1 Metal 2CH ASP+ 2CH 2000 Vintage—2000The source states this example is a 2000 vintage unit and includes the descriptors 8" R1 Metal 2CH ASP+ 2CH.Equipment inventory listing[3]
Centura I P 2 DPS, 8" R1 Metal 2CH ASP+ 2CH—2000—waferpedia.com[2]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Applied Materials Centura I P 2 DPS?

The Applied Materials Centura I P 2 DPS is a semiconductor deposition tool.[2]

What does DPS mean in the model name?

DPS stands for Decoupled Plasma Source.[1][3][2]

Not publicly documented

The following facts about the Centura I P 2 DPS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura I P 2 DPS are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Centura I P 2 DPS are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura I P 2 DPS are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura I P 2 DPS is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Centura I P 2 DPS are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
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Last updated Oct 21, 2026.

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