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Applied Materials

Centura II eMax

EtchApplied Materials Centura family
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The Centura II eMax is an etcher from Applied Materials with 8-inch wafer support. The Centura II eMax uses four eMax chambers. The Centura II eMax belongs to the Centura family.[1][2]

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What it is

The system processes 8-inch wafers and is equipped with four eMax chambers.[1][2]

How it works

General reference — not yet source-verified

The Centura II eMax operates by generating a plasma in a low-pressure chamber. Reactive ions and radicals in the plasma chemically and physically etch exposed layers on the wafer surface. The system may employ multiple process chambers to allow sequential etch steps without breaking vacuum.

Where it fits in the process flow

General reference — not yet source-verified

In semiconductor fabrication, dry etch systems like the Centura II eMax are used after lithography to transfer patterns by removing material from regions not protected by photoresist. The etched wafer then proceeds to resist stripping and subsequent metrology or deposition steps.

Applications

General reference — not yet source-verified

The Centura II eMax is applied to dry etch processes in semiconductor manufacturing, including etching of dielectric and conductor films for both front-end-of-line and back-end-of-line integration.

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[1]
Accurate?

Configuration & options3

4x eMax Chambers[1]
Accurate?
Chambers
4x eMax Chambers[1]
Accurate?
Category
Etch[2]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the Centura II eMax support?

8 inch (200 mm).[1][2]

How many eMax chambers are configured on the Centura II eMax?

Four eMax chambers.[1][2]

Not publicly documented

The following facts about the Centura II eMax are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura II eMax are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Centura II eMax are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Centura II eMax are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura II eMax are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura II eMax is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 12, 2026.

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