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Applied Materials

Endura 2

DepositionApplied Materials Endura family
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Endura 2 — Inventory photo
Fig. 01Endura 2Inventory photo[1]
  • Plate 01#Amat endura II xp robot overhaul exchange repair applied material pvd buffer robot 300mm pvd

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What it is

Applied Materials Endura 2 is a physical vapor deposition system used for semiconductor metal deposition. It is configured here for 12-inch wafers.[1]

How it works

General reference — not yet source-verified

A physical vapor deposition system forms thin films by transporting material from a source in vacuum and depositing it onto wafer surfaces. In this class of equipment, wafers are loaded into a transfer and process system, moved to deposition chambers, and coated under controlled conditions.

Where it fits in the process flow

General reference — not yet source-verified

This type of system belongs in the metallization portion of semiconductor fabrication, where conductive and barrier films are added after earlier patterning or surface preparation steps and before later interconnect formation steps.

What can it run?

Process applications and technology nodes documented for this tool.

  • Liner / Barrier
  • Metal Deposition
  • Front-End Metallization
  • Aluminum Interconnect

What do the numbers mean?

Vacuum & pumping1

Dedicated Pump[1]
Accurate?

Wafer handling3

XP Robot Type[1]
Accurate?
XP Robots[3]
Accurate?
Fi Robot
Yasakawa[3]
Accurate?

Control & software2

Software Version
2.10_692[2]
Accurate?
Front Interface Version 5.3[2]
Accurate?

Configuration & options20

Liner / Barrier[1]
Accurate?
Metal Deposition[1]
Accurate?
3 Loadports[1]
Accurate?
Liner/Barrier[7]
Accurate?
Front-End[2]
Accurate?
System Power Rating
208VAC/480VAC[2]
Accurate?
Loading Configuration
3 TDK Loadports[2]
Accurate?
Endura II Mainframe[2]
Accurate?
Chamber 1
Impulse PVD[2]
Accurate?
Chamber 2
Impulse PVD[2]
Accurate?
Chamber 3
Impulse PVD[2]
Accurate?
Chamber E
DMD[2]
Accurate?
Chamber F
DMD[2]
Accurate?
Can be fully refurbished with HDD replacement and reconfigured[2]
Accurate?
Front-End Metallization[8]
Accurate?
Aluminum Interconnect[3]
Accurate?
Ell Mf[3]
Accurate?
STD Blades[3]
Accurate?
3 Ch[9]
Accurate?
W 3CH, DMD 2CH[10]
Accurate?
Interested in this tool?
Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationDedicated Pump[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What wafer size does this system handle?

It is configured for 12-inch wafers.[8][2][11][7][1]

What type of deposition system is it?

It is a physical vapor deposition system.[8][2][11][7][1]

Not publicly documented

The following facts about the Endura 2 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Endura 2 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Endura 2 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Endura 2 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Endura 2 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Endura 2 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (12)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]inventory listing
  8. [8]inventory listing
  9. [9]inventory listing
  10. [10]inventory listing
  11. [11]Equipment inventory listing
  12. [12]Applied Materials, Inc. - Breaking the 65nm Barrierappliedmaterials.com (Oct 16, 2004)web.archive.org
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Last updated Jul 30, 2026.

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