Applied Materials

HEXP VIISta HE

Ion Implantation Applied Materials HEXP VIISta HE family

Research Quality: 10% complete

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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Power

60 Hz Operation^[1]

Vacuum

320FE CRYO OBIS,6^[1]

What is it?

What do the numbers mean?

Power & electrical1

Frequency: 60 Hz Operation^[1]

Vacuum & pumping4

Cryo Pump: 320FE CRYO OBIS,6^[1]
Cryo Pump Exhaust: SS Cryo Exhaust Through Roof^[1]
Cryo Compressor: IS-1000 KPa X 3^[1]
RP3 Exhaust: RP3 PVC Exhaust Line - Roof^[1]

Wafer handling2

Load Lock Vent: 500 Load LockVent Std Finish^[1]
Load Lock Vent Connection: 500 Vent Con Std Finish^[1]

Dimensions & facilities1

Facilities: Faci fr Botm(Air-N2-H2O-Power)^[1]

Configuration & options12

Includes:^[1]
Chiller: SMC remote 20M^[1]
Dosimetry: Advanced^[1]
Label Kit: English^[1]
Manometer: Triple Manometer 0-1 kPa^[1]; NSR - Roplat/Tilter^[1]; NSR - Platen Type 200mm SiC^[1]; NSR - Pick and Pad Type^[1]
Power Kit: Standard Power Kit^[1]
Profiler: Standard Rack and Pinion^[1]
Remote Harness Kit: 20M Rem Facilites Kit - Floor^[1]; NSR - Source SiC^[1]

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Axcelis NV 8250— Same function class: Ion Implantation, UnknownCompare in depthsource^[2]
Axcelis NV 8250 HT Ion— Same function class: Ion Implantation, UnknownCompare in depthsource^[3]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Cryo Pump320FE CRYO OBIS,6^[1]
Cryo Pump ExhaustSS Cryo Exhaust Through Roof^[1]
Cryo CompressorIS-1000 KPa X 3^[1]
Frequency60 Hz Operation^[1]
RP3 ExhaustRP3 PVC Exhaust Line - Roof^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the HEXP VIISta HE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HEXP VIISta HE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the HEXP VIISta HE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the HEXP VIISta HE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the HEXP VIISta HE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the HEXP VIISta HE is not on record.
Answerable by: an OEM datasheet or a fab qualification report