Waferpedia

Applied Materials

P 5000 Mark II

DepositionWafer OrienterIntroduced Applied Materials P 5000 Mark II family
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P 5000 Mark II — Inventory photo
Fig. 01P 5000 Mark IIInventory photo[1]

Wafer size

Wafer Orienter

Introduced

1991

Power

RF Generator Rack[1]

Vacuum

Edwards iH 80 Series[1]

Gas delivery

28[1]

What it is

General reference — not yet source-verified

The Applied Materials P 5000 Mark II belongs to the deposition class of process equipment. Such machines are used to place a material layer onto a substrate in a controlled vacuum or process environment, creating films that become part of an electrical, optical, or protective stack.

Machines of this class are a core part of thin-film manufacturing. They are built to produce repeatable coatings with controlled uniformity and adhesion so that downstream patterning, etching, or finishing steps can rely on a consistent starting surface.

How it works

General reference — not yet source-verified

The process is managed by controlling chamber conditions, substrate exposure, and the delivery of the film-forming material. By adjusting these parameters, machines of this class can form films with different compositions, thickness behaviors, and physical properties suited to the intended process.

Where it fits in the process flow

General reference — not yet source-verified

Deposition equipment is used early or midstream in the fabrication flow, after surface preparation and before pattern definition, etching, or other structuring steps that shape the deposited material into device features.

Applications

General reference — not yet source-verified

Machines of this class are generally used to create conductive, insulating, barrier, protective, or functional thin films on wafers and other precision substrates. These films support semiconductor devices, interconnect structures, optical coatings, and related layered products.

  • PECVD

What do the numbers mean?

Power & electrical2

RF Generator Rack[1]
Accurate?
Voltage
208VAC 50/60Hz[10]
Accurate?

Vacuum & pumping1

Load Lock Pump
Edwards iH 80 Series[1]
Accurate?

Wafer handling4

Center finder board retrofitted for transparent & opaque substrates[1]
Accurate?
Wafer size
Wafer Orienter[1]
Accurate?
Phase
Phase 3 Robot[1]
Accurate?
Phase
Phase 3 Cassette Handler[1]
Accurate?

Gas & chemistry2

Gas Panel Type
28[1]
Accurate?
CES Gas Panel[1]
Accurate?

Control & software3

Software
b6.02[9]
Accurate?
Mini Controller[1]
Accurate?
Software
4.8_26[14]
Accurate?

Configuration & options17

DxZ[7]
Accurate?
DxL[8]
Accurate?
Refurbished[1]
Accurate?
Silane PECVD[1]
Accurate?
Install Type
Through Wall[1]
Accurate?
All cables present[1]
Accurate?
Bolt Down Lid[1]
Accurate?
Storage Elevator
29 slots[1]
Accurate?
Expanded (21 Slot) VME[1]
Accurate?
Floppy Drive
3 1/2[1]
Accurate?
Remote Frame w/AC Box[1]
Accurate?
Applied Materials Heat Exchanger[1]
Accurate?
No CE Mark[1]
Accurate?
3 CVD (PSG USG)[11]
Accurate?
2 WxZ, 2 WxP[12]
Accurate?
Qty 3 - DLH Delta PECVD Silane
Silane Oxide Deposition[2]
Accurate?
Qty 3 - DLH PECVD Silane
Silane Oxide Deposition[13]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
P 5000 Mark II PECVD, 8" DxZEquipment inventory listing[7]
P 5000 Mark II PECVD, 8" DxLEquipment inventory listing[8]
P 5000 Mark II PECVD, 8"1991Software: b6.02; 1991 Vintage.Equipment inventory listing[9]
P 5000 Mark II PECVD, 6"2010Described as refurbished; includes a Wafer Orienter, Phase 3 Robot, Phase 3 Cassette Handler, and other listed hardware/options.Equipment inventory listing[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Gas Panel Type28[1]
  • ConfigurationCES Gas Panel[1]
  • ConfigurationRF Generator Rack[1]
  • Load Lock PumpEdwards iH 80 Series[1]
  • Voltage208VAC 50/60Hz[10]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What does a deposition system do?General reference — not yet source-verified

It forms a thin material layer on a substrate under controlled process conditions.

Why is deposition important in fabrication?General reference — not yet source-verified

It creates the base layers and functional films that later process steps shape into the final device.

What kinds of films do machines of this class make?General reference — not yet source-verified

They are used for conductive, insulating, barrier, protective, and other functional thin films.

Where does deposition sit in the process flow?General reference — not yet source-verified

It is typically performed after substrate preparation and before patterning or other structuring operations.

What kind of substrates can this class handle?General reference — not yet source-verified

Machines of this class are used for semiconductor and precision-optics substrates that require controlled thin-film layers.

Not publicly documented

The following facts about the P 5000 Mark II are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 5000 Mark II are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the P 5000 Mark II are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the P 5000 Mark II are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the P 5000 Mark II is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the P 5000 Mark II are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (14)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]inventory listing
  8. [8]inventory listing
  9. [9]inventory listing
  10. [10]inventory listing
  11. [11]inventory listing
  12. [12]inventory listing
  13. [13]inventory listing
  14. [14]inventory listing
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Last updated Jul 30, 2026.

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