Waferpedia

Applied Materials

P 5000 Mark II Dielectric

EtchApplied Materials P 5000 Mark II family
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The Applied Materials P 5000 Mark II Dielectric is a dielectric etch system. The Applied Materials P 5000 Mark II Dielectric processes 6-inch wafers.[1][2]

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What it is

The Applied Materials P 5000 Mark II Dielectric Etch is a dielectric etch system. The Applied Materials P 5000 Mark II Dielectric Etch is part of the P 5000 Mark II family. The Applied Materials P 5000 Mark II Dielectric Etch processes 6 inch wafers.[1][2][3]

How it works

General reference — not yet source-verified

Dielectric etch systems generally use a plasma to remove insulating films from exposed regions while protected regions remain covered by patterned resist or another mask. Plasma etch processes for dielectric materials typically rely on controlled gas chemistry, chamber conditions, and wafer handling to shape openings with the profile needed for subsequent fabrication steps.

Where it fits in the process flow

General reference — not yet source-verified

Dielectric etch is performed after the deposition of dielectric films and after lithography defines the pattern in photoresist. Dielectric etch is followed by steps such as cleaning, metallization, or further deposition, depending on the device flow.

Applications

General reference — not yet source-verified

Dielectric etch systems are used in integrated circuit manufacturing to pattern insulating materials. Typical applications include forming contact holes, vias, trenches, spacer features, hard mask features, and etch stop related structures in dielectric films.

What do the numbers mean?

Wafer handling1

Wafer size
6 inch[1]
Accurate?

Configuration & options6

MxP+[2]
Accurate?
MxP[3]
Accurate?
OEM
Applied Materials[1]
Accurate?
Model
P 5000 Mark II[1]
Accurate?
Tool type
Dielectric Etch[1]
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Asset #
152880[2]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
P 5000 Mark II Dielectric———waferpedia.com[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Who manufactures the P 5000 Mark II Dielectric Etch?

The P 5000 Mark II Dielectric Etch is manufactured by Applied Materials.[1][2][3]

What is the model designation of this dielectric etch system?

The model designation is P 5000 Mark II.[1][2][3]

What wafer size does the P 5000 Mark II Dielectric Etch process?

The P 5000 Mark II Dielectric Etch processes 6 inch wafers.[1][2][3]

Not publicly documented

The following facts about the P 5000 Mark II Dielectric are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the P 5000 Mark II Dielectric are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the P 5000 Mark II Dielectric are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the P 5000 Mark II Dielectric are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the P 5000 Mark II Dielectric is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the P 5000 Mark II Dielectric are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]inventory listing
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Last updated Oct 21, 2026.

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