Applied Materials
Precision 5000
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Precision 5000 is a chemical vapor deposition (CVD) machine introduced by Applied Materials in 1987. The Precision 5000 differed from existing machines by incorporating diverse processes into a single machine with multiple process chambers. In 1993, the Precision 5000 was inducted into the Smithsonian Institution's permanent collection of Information Age technology.[1]
Produced
1987–
Gas delivery
Chemical vapor deposition (CVD)[1]
What it is
The Applied Materials Precision 5000 is a chemical vapor deposition machine for semiconductor wafer fabrication. The Applied Materials Precision 5000 was introduced in 1987. The Applied Materials Precision 5000 differed from existing machines by incorporating diverse processes into a single machine with multiple process chambers. The Applied Materials Precision 5000 was inducted into the Smithsonian Institution's permanent collection of Information Age technology in 1993.[1][3]
How it works
The Applied Materials Precision 5000 is a single-wafer, multi-chamber platform for sequential wafer processing. The Applied Materials Precision 5000 supports wafer sizes of 4 inch, 5 inch, 6 inch, and 8 inch. The Applied Materials Precision 5000 supports up to 4 separate process chambers. The Applied Materials Precision 5000 processes wafers in a low vacuum environment.[2]
The Applied Materials Precision 5000 was designed as a four-chamber platform system with auto ports at each chamber and a robotic arm transferring each wafer between chambers and wafer load and unload. The Applied Materials Precision 5000 was the first successful system of its type to perform several processes in sequence well enough to be placed into manufacturing.[4][5]
Where it fits in the process flow
General reference — not yet source-verifiedDeposition systems sit in the film formation portions of wafer fabrication, where they add layers that will later be patterned, etched, or left as protective films. Deposition steps commonly follow wafer cleaning or surface preparation and precede lithography, etch, strip, or thermal treatments depending on the device flow. Multi-chamber deposition platforms are useful when a sequence of related wafer treatments benefits from internal transfer between modules.
Applications
The Applied Materials Precision 5000 platform can be configured with chamber types for lamp heated CVD, tungsten deposition, tungsten etch back, dielectric etch, polysilicon etch, metal etch, sputter etch or reactive ion etching, and advanced strip passivation. The Applied Materials Precision 5000 platform can also include orienter and cooldown modules.[2][6]
- Semiconductor manufacturing
What do the numbers mean?
Wafer handling2
Gas & chemistry1
Configuration & options3
Vintage & configurations
- 1987Production start[1]
Applied Materials introduced the Precision 5000 in 1987.
- 1987Introduction[1]
Applied introduced the Precision 5000 chemical vapor deposition machine.
- 1993Smithsonian collection[1]
The Applied Materials Precision 5000 was inducted into the Smithsonian Institution's permanent collection of Information Age technology.
- 1993Smithsonian permanent collection induction[1]
The Precision 5000 was inducted into the Smithsonian Institution's permanent collection of Information Age technology.
- 1993Inducted into Smithsonian collection[1]
The Applied Materials' Precision 5000 was inducted into the Smithsonian Institution's permanent collection of Information Age technology.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ProcessChemical vapor deposition (CVD)[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Applied Materials Precision 5000?
The Applied Materials Precision 5000 is a chemical vapor deposition machine.[1][3]
When was the Applied Materials Precision 5000 introduced?
The Applied Materials Precision 5000 was introduced in 1987.[1][3]
How is the Applied Materials Precision 5000 architected?
The Applied Materials Precision 5000 was designed as a four-chamber platform system with auto ports at each chamber and a robotic arm transferring each wafer between chambers and wafer load and unload.[4][5]
What wafer sizes does the Applied Materials Precision 5000 support?
The Applied Materials Precision 5000 supports wafers ranging in size from 4 inch, 5 inch, 6 inch, or 8 inch.[2]
How many process chambers can the Applied Materials Precision 5000 support?
The Applied Materials Precision 5000 supports up to 4 separate process chambers.[2]
Not publicly documented
The following facts about the Precision 5000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the Precision 5000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Precision 5000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Precision 5000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Precision 5000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Precision 5000 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]en.wikipedia.org — en.wikipedia.orgen.wikipedia.org
- [2]hdpac.com — hdpac.comhdpac.com
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]Applied Materials - Precision 5000 CVD — chiphistory.orgchiphistory.org
- [5]Applied Materials - Precision 5000 CVD — chiphistory.orgchiphistory.org
- [6]P5000 Refurbishing & Parts, Precision 5000, Applied Materials, AMAT Equipment — versateksolutions.comversateksolutions.com
Last updated Oct 20, 2026.
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