Waferpedia

Applied Materials

UVision SP 200 Brightfield Wafer

Metrology & InspectionTool scans a wafer in a meander pathApplied Materials UVision family
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UVision SP 200 Brightfield Wafer — Inventory photo
Fig. 01UVision SP 200 Brightfield WaferInventory photo[1]

Wafer size

Tool scans a wafer in a meander path

Power

3 Phase[1]

Optics

Laser ( 266 ג =nm)[1]

What is it?

The Applied Materials UVision SP 200 is a brightfield wafer inspection tool for 12-inch wafers.

What do the numbers mean?

Power & electrical2

Phase
3 Phase[1]
Accurate?
50/60 Hz[1]
Accurate?

Wafer handling3

Designed to inspect pattern wafers, but it can also inspect bare and unpatterned wafers[1]
Accurate?
Wafer size
Tool scans a wafer in a meander path[1]
Accurate?
On pattern wafers capable of detecting defects of 25 nm with 90 %[1]
Accurate?

Optics & imaging1

Ligth source
Laser ( 266 ג =nm)[1]
Accurate?

Control & software1

Capture Rate (Data from D&E recipe[1]
Accurate?

Configuration & options3

5 Wire[1]
Accurate?
Die to Die ” and Cell to Cell ” comparison capability[1]
Accurate?
Can use reflected --( BrigthField ) and scattered signal (GF = GreyField ) in parallel for detection[1]
Accurate?
Interested in this tool?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Configuration50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the UVision SP 200 Brightfield Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the UVision SP 200 Brightfield Wafer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the UVision SP 200 Brightfield Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the UVision SP 200 Brightfield Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the UVision SP 200 Brightfield Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the UVision SP 200 Brightfield Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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