ASM

Eagle XP

Deposition ASM Eagle family

Research Quality: 30% complete

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Eagle XP — Inventory photo — Fig. 01Eagle XPInventory photo^[1]

Power

P/N 1060-625-01^[1]

Vacuum

ALD/LL/WHC is Edwards IXH 1210^[1]

Gas delivery

500 SCCM, 3 SLM^[1]

What is it?

ASM Eagle XP is an ALD (Atomic Layer Deposition) system with a 12-inch wafer size.

What do the numbers mean?

Power & electrical1

Power Supply & AC Dist Box: P/N 1060-625-01^[1]

Vacuum & pumping3

Backing Pump(s): ALD/LL/WHC is Edwards IXH 1210^[1]
Vacuum Load Port Vacuum: -86.2^[1]
Gas LLC Pressure: 0.56/0.209 MPA^[1]

Wafer handling1

Robot Type: Yawuski^[1]

Gas & chemistry2

Ar: 500 SCCM, 3 SLM^[1]
N2: 500 SCCM^[1]

Dimensions & facilities1

CDA LLC PN2: 403^[1]

Configuration & options8

XP Platform^[1]; HDD not included^[1]; All cables present^[1]; System SW (OS) Version 1.58a-001^[1]
Heater Jacket: Intraco Taiwan Corporation^[1]
DIW: 2.95^[1]
FI: 100 Pa^[1]
Differential: 3.5 Pa^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power Supply & AC Dist BoxP/N 1060-625-01^[1]
Backing Pump(s)ALD/LL/WHC is Edwards IXH 1210^[1]
Vacuum Load Port Vacuum-86.2^[1]
Gas LLC Pressure0.56/0.209 MPA^[1]
Ar500 SCCM, 3 SLM^[1]
N2500 SCCM^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Eagle XP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Eagle XP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Eagle XP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Eagle XP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Eagle XP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Eagle XP is not on record.
Answerable by: an OEM datasheet or a fab qualification report