ASML

PAS 2000

Legacy LithographyIntroduced 1984Produced 1985–ASML PAS 2000 family

Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Produced

1985–

Vacuum

Oil pressure instead of electric motors^[1]

Preceded by

First in line

This tool

PAS 2000

Succeeded by

PAS 5500

All related

What is it?

The PAS 2000 was ASML's first lithography product. The source states that it was a commercial and technical failure and that it used oil pressure rather than electric motors to move the wafer during exposure, which had a tendency to leak.

What can it run?

Process applications and technology nodes documented for this tool.

Production of integrated circuits

Why won't it start?

Documented failure modes, common issues, and field considerations.

Commercial and technical failure
Oil-pressure wafer movement had a tendency to leak

What do the numbers mean?

Vacuum & pumping1

Wafer motion mechanism: Oil pressure instead of electric motors^[1]

Configuration & options1

Product type: Lithography machine^[1]

Vintage & configurations

1984First product^[1]
ASML's first product was the PAS 2000.
1985-06-30Production start^[2]
Referenced with relevant date 1985-06-30 in the source entry for the PAS 2000 wafer stepper.

LineageSucceeded by PAS 5500 All related models

Interested in this tool?

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What replaced it?

successorASML PAS 5500— ASML developed the PAS 5500 after the PAS 2000; the PAS 5500 became the company's first commercial breakout.source^[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Wafer motion mechanismOil pressure instead of electric motors^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the PAS 2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

Fewer than 3 independently cited specifications for the PAS 2000 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented variants, configuration options, or revision breakpoints of the PAS 2000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the PAS 2000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PAS 2000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PAS 2000 are on record.
Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]en.wikipedia.org — en.wikipedia.orgen.wikipedia.org
[2]chiphistory.org — chiphistory.orgchiphistory.org
[3]PAS 2000 Wafer Stepper by ASML product specification & brochure — chiphistory.orgchiphistory.org