Waferpedia

FOUP

Automation

Front Opening Unified Pod: the sealed plastic carrier that holds a lot of 300 mm wafers in a clean mini-environment as it moves between tools. Tools dock FOUPs on standardized load ports and open them through a front-opening interface, so wafers travel the fab without exposure to ambient air.

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]FOUPWikipediaen.wikipedia.org