15 entries
The Filmetrics F50-UV is a thin-film metrology tool that measures film thickness via spectroscopic reflectometry and can generate thickness uniformity maps.
The Axcelis NV GSD HE is an ion implantation system that can handle 6-inch and 8-inch wafers.
The KLA Inspex Eagle Tester is a wafer handling and inspection system with 6-inch chuck and prealigner, 4-inch to 8-inch wafer capability, cassette-to-cassette handling, two ports, and a Zeiss microscope.
Tokyo Electron NS 300 + Wafer Scrubber is a wet-process wafer scrubber for 8-inch wafers.
Oxford Instruments Plasmalab 80 Plus RIE is a reactive ion etcher with support for wafers up to 8 inches.
ASM Siplace CA 4 Wafer is an 8-inch wafer system described as a high-volume chip assembly and 4-portal microchip/SMD hybrid assembly system.
The Axcelis VHE is an ion implanter described as a 6"-8" wafer convertible system.
The Denton Vacuum 635 is a sputter deposition tool with four confocal cathodes, an 8-inch diameter stage, and configurable DC, RF, and reactive sputtering capabilities.
General referenceLam Research 2300 is an etch system used for pattern transfer in semiconductor processing. It belongs to the class of plasma-based etch equipment used to remove selected material from a wafer according to a patterned mask.
The ASM AD 838 is an 8-inch-wafer die bonder with epoxy dispensing and no stack input, operating on single-phase 220 Vac at 50/60 Hz.
The Disco KR15 is a 200-micron-thick, low-grit dicing blade used for cutting sapphire, glass, and silicon samples.
Lam Research Rainbow 4520 is a single-wafer plasma/RIE etching system described as part of the Rainbow 45XX series.
The Laurell WS-650Mz-8NPPB is a spin coater that can take up to 8 inch wafers and go up to 10000 rpm.