Orion 868 AOI

The Camtek Orion 868 AOI is an automated optical inspection system. The Camtek Orion 868 AOI belongs to the metrology and inspection equipment class.^[4][5]

Automated optical inspection systems image patterned surfaces and compare the observed features with expected pattern information or learned reference data. Automated optical inspection systems are used to detect visible pattern defects, contamination, bridging, opens, and other surface anomalies without contacting the wafer or substrate. Automated optical inspection systems combine illumination, imaging optics, motion control, and defect classification software to scan production material and flag sites for review.

Automated optical inspection tools are used after patterning and related build steps to check whether the manufactured features match the intended result. Automated optical inspection tools are commonly placed between process modules and review activities so that defect excursions can be found before additional value is added downstream. Automated optical inspection tools support process monitoring, line control, and disposition decisions for lots, wafers, and layers under inspection.

Automated optical inspection systems are applied to patterned semiconductor and microfabrication surfaces where optical contrast can reveal defects or process variation. Automated optical inspection systems are used for defect discovery on features formed by lithography, etch, deposition, and related pattern transfer operations. Automated optical inspection systems can support yield learning, excursion detection, and routine in-line quality monitoring.