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Cohu

MT9510

Test & ProbeCohu MT9510 family
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CohuMT9510
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Power

400 V AC 3 phases/N/PE, 16 Amps each[4]

Vacuum

5 to 10 bar (70 to 145 psi)[4]

Performance

up to 5,300 UPH[3]

What it is

General reference — not yet source-verified

Test handlers move semiconductor devices between media, present each device to the electrical interface, and sort devices after test according to the test outcome. Pick-and-place handlers are used for packaged parts rather than wafers, and they form part of back-end electrical test operations between package handling and final device disposition.

How it works

The MT9510 XP supports short-contact ambient and short-contact tri-temp test using plunge-to-board contacting. The MT9510 XP uses a flat vertical contact site. The MT9510 XP supports standard, high-frequency, and Kelvin contacting. The MT9510 XP supports automatic tray module and single-tray output versions.[4]

Where it fits in the process flow

Package test takes place after assembly and before final device release, and the broader package-test flow follows wafer test and package assembly. A test handler such as the MT9510 fits at the packaged-device electrical test stage, where devices are inserted into a contactor for automated test and then sorted based on results.[5]

Applications

General reference — not yet source-verified

Packaged-device handlers are used where singulated semiconductor parts need repeatable electrical contact under controlled handling and thermal conditions. Such tools are common in production test for logic, analog, power, sensor, and mixed-signal packages, especially when package style or test temperature must be managed by the handler.

What do the numbers mean?

Power & electrical1

Power supply
400 V AC 3 phases/N/PE, 16 Amps each[4]
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Vacuum & pumping1

Compressed air pressure
5 to 10 bar (70 to 145 psi)[4]
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Wafer handling4

Product grouping
Test Handlers[1]2 sources
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Equipment type
test handler[2]
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Handler type
pick-and-place[3]
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Loader type
tray stack, separate input/output tray loop[4]
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Performance2

Throughput
up to 5,300 UPH[3]
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Temperature accuracy
±2.0°C[4]
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Control & software1

Bin categories
High volume plus 3 or 6 manual categories; software binning categories: 32[4]
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Dimensions & facilities3

Footprint
1.19 m x 1.57 m (47" x 62")[3]
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Weight
850 kg (1,900 lbs)[4]
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Docking height
990 mm (floor to CUH center)[4]
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Configuration & options19

OEM
Cohu[1]
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Model
MT9510[1]
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Temperature range
-55°C to +175°C[3]
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Test site parallelism
up to x16[3]
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Test site parallelism
up to x8[4]
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Index time
0.38 seconds (XP)[3]
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Index time
0.05 s / device (octal mode)[4]
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Package size range
3 x 3 mm to 70 x 70 mm[3]
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Device size range
3 mm x 3 mm to 70 mm x 70 mm[4]
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Package styles
QFP, BGA, Micro-BGA, CSP, TSSOP, PLCC, PGA, LGA, MLP/MLF[3]
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Kitable system packages
QFP, BGA, PGA, QFN and other packages[4]
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Temperature stability
±0.5°C[4]
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Power consumption
max. 5,200 W[4]
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LN2 consumption
Typ. 18 l/h for cold operation; typ. 33 l/h for cooling down from ambient to -55°C[4]
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Compressed air consumption
170 l/min to 940 l/min[4]
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Loading/unloading
All commonly used trays acc. to JEDEC standard CO-012, CO-029 and CO-034[4]
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Contact modes
Parallel; Ping-pong[4]
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Applications
short contact ambient (plunge to board); short contact tri-temp (plunge to board); standard (including temperature insulation and hot air purge)[4]
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Standards
CE; SEMI S2-93 assessment[4]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
MT9510 XP——Provides full temperature control during test in extreme environmental conditions from -55°C to +175°C.cohu.com[3]
MT9510 x16——Continues the MT9510 XP features in terms of reliability, temperature performance and advanced options.cohu.com[3]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power supply400 V AC 3 phases/N/PE, 16 Amps each[4]
  • Compressed air pressure5 to 10 bar (70 to 145 psi)[4]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of equipment is the Cohu MT9510?

The Cohu MT9510 is a tri-temp pick-and-place semiconductor test handler.[3][1]

What temperature range does the MT9510 support?

The MT9510 supports full tri-temp operation from -55°C to +175°C.[3][4]

Not publicly documented

The following facts about the MT9510 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MT9510 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the MT9510 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MT9510 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MT9510 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the MT9510 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]cohu.com — cohu.comcohu.com
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]cohu.com — cohu.comcohu.com
  4. [4]cohu.com — cohu.comcohu.com
  5. [5]https://imapsource.org/article/116355.pdf — imapsource.orgimapsource.org
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Last updated Oct 16, 2026.

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