Tokyo Electron

Alpha 8 SE D

Thermal / Diffusion Tokyo Electron Alpha family

Research Quality: 30% complete

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Alpha 8 SE D — Inventory photo — Fig. 01Alpha 8 SE DInventory photo^[1]

Gas delivery

Waves^[1]

Optics

Fenwal / MDMR-5FR^[1]

What is it?

The Tokyo Electron Alpha 8 SE D is a 6-inch furnace used for high-temperature oxide processing.

What do the numbers mean?

Wafer handling1

Cassette I/O Type: Normal I/O Type^[1]

Gas & chemistry6

Gas Controller: Waves^[1]
Gas Flow Chart Panel: Installed (Front, Rear)^[1]
Gas Detector: GD-K 7 D 4^[1]
Detecting Gas: Hcl, N2O^[1]
Process Gas: N2, O2, H2, N2O^[1]
Basic Style: Integrated Gas System (Fujikin)^[1]

Optics & imaging1

Furnace Overtemp Detector: Fenwal / MDMR-5FR^[1]

Control & software5

System Main Controller: Waves^[1]
Mechanical Controller: Waves^[1]
Sequence Controller: Waves^[1]
Furnace Temperature Controller: 560 A^[1]
User Host Computer I/F: SECS^[1]

Configuration & options8

High Temp Oxide^[1]
System Type: L Type^[1]
Heater Model: VMU-40-007EX (1200 Deg C)^[1]
AGV Compatibility: Unable^[1]
Optional Panel: Installed (Front, Rear)^[1]
Signal Tower / Colors: Installed, 3 colors^[1]; Host Communications^[1]
Process: Hi Temp Oxide^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Gas ControllerWaves^[1]
Gas Flow Chart PanelInstalled (Front, Rear)^[1]
Gas DetectorGD-K 7 D 4^[1]
Detecting GasHcl, N2O^[1]
Process GasN2, O2, H2, N2O^[1]
Basic StyleIntegrated Gas System (Fujikin)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Alpha 8 SE D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alpha 8 SE D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alpha 8 SE D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alpha 8 SE D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alpha 8 SE D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alpha 8 SE D is not on record.
Answerable by: an OEM datasheet or a fab qualification report