Tokyo Electron
Alpha 8 S Vertical
Provisional entry — research in progress
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The Tokyo Electron Alpha 8 S is a vertical furnace. The Alpha 8 S supports 8-inch wafers. The Alpha 8 S is configured for ATM Oxide processes.[1]
What it is
General reference — not yet source-verifiedVertical furnaces are a class of batch furnace equipment used in semiconductor fabrication. Vertical furnaces heat wafers inside a vertically oriented process tube. The vertical tube arrangement occupies less cleanroom floor space than comparable horizontal tube furnaces.
How it works
General reference — not yet source-verifiedIn a vertical furnace, a boat holding wafers is raised into the process tube from below by an elevator. The process tube of a vertical furnace is surrounded by heating elements arranged in separate temperature zones. Each zone has its own temperature control to keep the wafer load uniform in temperature. Wafers are spaced in the boat so that gas reaches each wafer surface.
Process gases enter the tube and flow over the wafer surfaces. A vacuum or atmospheric-pressure gas environment can be maintained inside the tube. An automated controller sequences gas flow, temperature changes, and process step timing.
Where it fits in the process flow
General reference — not yet source-verifiedThermal furnaces perform front-end-of-line process steps in wafer fabrication. Oxidation steps in a vertical furnace grow silicon dioxide films that serve as gate dielectrics, isolation liners, and mask layers. Diffusion steps use furnace heat to move dopant atoms into the silicon crystal. Annealing steps repair ion-implant damage and activate implanted dopants. Furnace thermal steps follow wafer cleaning and precede later deposition and patterning steps.
Applications
The Alpha 8 S is used for ATM oxide processing. The Alpha 8 S is an oxide-process vertical furnace.[1]
What do the numbers mean?
Wafer handling1
Configuration & options2
- ATM Oxide[1]
Where are the manuals?
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Not publicly documented
Field notes
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Frequently asked questions
What type of equipment is the Alpha 8 S Vertical Furnace?
It is a vertical furnace for semiconductor manufacturing.[1]
Not publicly documented
The following facts about the Alpha 8 S Vertical are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alpha 8 S Vertical are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alpha 8 S Vertical are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alpha 8 S Vertical are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alpha 8 S Vertical are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alpha 8 S Vertical is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Sep 1, 2026.