Waferpedia

Hitachi

S-3400

Metrology & InspectionHitachi S-3400 family
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Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

  • Plate 01HITACHI S-3400 SEM Instructional Video - Northwestern University

    NUANCE CenterWatch on YouTube

  • Plate 02HITACHI S-3400 SEM Instructional Video (The Really Fast Version)

    NUANCE CenterWatch on YouTube

  • Plate 03Hitachi s3400 SEM Workflow

    MWAC EMU videosWatch on YouTube

  • Plate 04SEM: EDS Hitachi s3400 Workflow

    Microscopy AustraliaWatch on YouTube

  • Plate 05SEM: Hitachi s3400 SEM Workflow

    Microscopy AustraliaWatch on YouTube

Vacuum

Hitachi S-3400 Variable Pressure SEM[1]

Optics

Back scatter or ESED secondary detector[1]

What is it?

The sources identify the equipment as a Hitachi S-3400 Variable Pressure SEM, with the manufacturer listed as Hitachi S-3400N. It is described as a variable pressure scanning electron microscope that can image non-conductive samples at higher chamber pressures, can image in back scatter or ESED secondary detector modes, and is fitted with an EDS silicon drift detector for elemental composition analysis.

What can it run?

Process applications and technology nodes documented for this tool.

  • Imaging non-conductive samples
  • Elemental composition analysis

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • No powder samples in this SEM

What do the numbers mean?

Vacuum & pumping4

Equipment name
Hitachi S-3400 Variable Pressure SEM[1]
Accurate?
Instrument type
Variable pressure scanning electron microscope[1]
Accurate?
Imaging capability
Can image non-conductive samples at higher chamber pressures[1]
Accurate?
Ultimate resolution
Approximately 3 nm in normal operation (high vacuum mode)[1]
Accurate?

Optics & imaging2

Detector modes
Back scatter or ESED secondary detector[1]
Accurate?
EDS
EDS silicon drift detector for determining elemental composition of samples[1]
Accurate?

Configuration & options2

Model
S-3400[1]
Accurate?
Manufacturer
Hitachi S-3400N[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
S-3400N———nanocenter.umd.edu[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Equipment nameHitachi S-3400 Variable Pressure SEM[1]
  • Instrument typeVariable pressure scanning electron microscope[1]
  • Imaging capabilityCan image non-conductive samples at higher chamber pressures[1]
  • Ultimate resolutionApproximately 3 nm in normal operation (high vacuum mode)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the S-3400 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S-3400 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the S-3400 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the S-3400 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the S-3400 are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the S-3400 are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]nanocenter.umd.edu — nanocenter.umd.edunanocenter.umd.edu
  2. [2]Equipment | FabLab | Maryland NanoCenter — nanocenter.umd.edunanocenter.umd.edu
  3. [3]Equipment | FabLab | Maryland NanoCenter — nanocenter.umd.edunanocenter.umd.edu
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Last updated Jul 29, 2026.

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