Hitachi
S 7800 CD-SEM
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The S 7800 belongs to the Hitachi S 7800 CD-SEM family of metrology and inspection tools.[4]
How it works
General reference — not yet source-verifiedA CD-SEM operates by scanning a focused electron beam across the wafer surface and detecting electrons emitted from the sample to form an image. The instrument measures feature dimensions from the resulting electron micrograph with nanometer-scale precision.
Where it fits in the process flow
General reference — not yet source-verifiedCD-SEM metrology tools are used in semiconductor fabrication after patterning and etch steps to verify that critical dimensions match design specifications. Measurements from the CD-SEM feed back into lithography and etch process control loops.
Applications
General reference — not yet source-verifiedCD-SEMs of this class are also used in semiconductor research and development, process development, and failure analysis laboratories.
What do the numbers mean?
Wafer handling1
Optics & imaging2
- Dry EDX detector[3]
Dimensions & facilities1
Configuration & options4
- Refurbished[3]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of tool is the Hitachi S 7800?
The Hitachi S 7800 is a critical dimension scanning electron microscope (CD-SEM).[3][5][4]
Not publicly documented
The following facts about the S 7800 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 7800 CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 7800 CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 7800 CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 7800 CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 7800 CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]Hitachi S 7800 CD-SEM family | Waferpedia — waferpedia.comwaferpedia.com
- [5]S 7800 CD-SEM — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 13, 2026.
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